Increase of Bioactivity by Hydrogen Ion Implantation into Silicon Wafer

X.Y. Liu; R.W.Y. Poon; R.K.Y. Fu; P.K. Chu; C.X. Ding

Increase of Bioactivity by Hydrogen Ion Implantation into Silicon Wafer

X.Y. Liu
, R.W.Y. Poon
, R.K.Y. Fu
, P.K. Chu
, C.X. Ding

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

The bioactivity of hydrogen ion implantation into silicon wafer was studied. The formation of apatite on the silicon wafer after soaked in simulated body fluid (SBF) was used to evaluate its bioactivity. The thin-film X-ray diffraction (XRD) spectrum of H-ion implanted silicon wafer soaked in SBF for 28 days was studied. The results show that the bioactivity of silicon wafer is improved by hydrogen plasma immersion ion implantation.

Original language	English
Title of host publication	7^th World Biomaterials Congress 2004
Publisher	Australian Society for Biomaterials Inc.
Pages	1113
ISBN (Electronic)	9781877040191
ISBN (Print)	9781604234619
Publication status	Published - May 2004
Event	7th World Biomaterials Congress 2004: Transactions - Sydney Conventior & Exhibition Centre, Sydney, Australia Duration: 17 May 2004 → 21 May 2004

Conference

Conference	7th World Biomaterials Congress 2004
Place	Australia
City	Sydney
Period	17/05/04 → 21/05/04

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title = "Increase of Bioactivity by Hydrogen Ion Implantation into Silicon Wafer",

abstract = "The bioactivity of hydrogen ion implantation into silicon wafer was studied. The formation of apatite on the silicon wafer after soaked in simulated body fluid (SBF) was used to evaluate its bioactivity. The thin-film X-ray diffraction (XRD) spectrum of H-ion implanted silicon wafer soaked in SBF for 28 days was studied. The results show that the bioactivity of silicon wafer is improved by hydrogen plasma immersion ion implantation.",

author = "X.Y. Liu and R.W.Y. Poon and R.K.Y. Fu and P.K. Chu and C.X. Ding",

year = "2004",

month = may,

language = "English",

isbn = "9781604234619",

pages = "1113",

booktitle = "7th World Biomaterials Congress 2004",

publisher = "Australian Society for Biomaterials Inc.",

note = "7th World Biomaterials Congress 2004 : Transactions ; Conference date: 17-05-2004 Through 21-05-2004",

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TY - GEN

T1 - Increase of Bioactivity by Hydrogen Ion Implantation into Silicon Wafer

AU - Liu, X.Y.

AU - Poon, R.W.Y.

AU - Fu, R.K.Y.

AU - Chu, P.K.

AU - Ding, C.X.

PY - 2004/5

Y1 - 2004/5

N2 - The bioactivity of hydrogen ion implantation into silicon wafer was studied. The formation of apatite on the silicon wafer after soaked in simulated body fluid (SBF) was used to evaluate its bioactivity. The thin-film X-ray diffraction (XRD) spectrum of H-ion implanted silicon wafer soaked in SBF for 28 days was studied. The results show that the bioactivity of silicon wafer is improved by hydrogen plasma immersion ion implantation.

AB - The bioactivity of hydrogen ion implantation into silicon wafer was studied. The formation of apatite on the silicon wafer after soaked in simulated body fluid (SBF) was used to evaluate its bioactivity. The thin-film X-ray diffraction (XRD) spectrum of H-ion implanted silicon wafer soaked in SBF for 28 days was studied. The results show that the bioactivity of silicon wafer is improved by hydrogen plasma immersion ion implantation.

UR - https://www.scopus.com/pages/publications/13844275756

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-13844275756&origin=recordpage

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9781604234619

SP - 1113

BT - 7th World Biomaterials Congress 2004

PB - Australian Society for Biomaterials Inc.

T2 - 7th World Biomaterials Congress 2004

Y2 - 17 May 2004 through 21 May 2004

ER -

Increase of Bioactivity by Hydrogen Ion Implantation into Silicon Wafer

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