Abstract
Metal resistive heater on dielectric membrane structures are common in MEMS. In this paper, the evolution of the surface topography of this type of structure during operation is studied by in situ digital holographic microscopy with nanometer-scale resolution. Devices of a typical design with platinum resistive heater lying on 200 nm silicon nitride membrane were fabricated by standard MEMS processes. A permanent out-of-plane surface deformation up to 200 nm could be detected when applying heating cycles via real-time in situ images of the device surface profile. Such deformation bears the risk of failure in the thin membrane device. © 2012 IEEE.
| Original language | English |
|---|---|
| Title of host publication | 2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
| Pages | 557-561 |
| DOIs | |
| Publication status | Published - 2012 |
| Event | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan Duration: 5 Mar 2012 → 8 Mar 2012 |
Conference
| Conference | 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 |
|---|---|
| Place | Japan |
| City | Kyoto |
| Period | 5/03/12 → 8/03/12 |
Research Keywords
- digital holograpic microscopy
- membrane
- microheater
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