In situ mechanical characterization of one dimensional nanoscale building blocks using novel microfabricated devices

We report the development of simple micro-devices that can be used to perform in situ quantitative nanomechanical characterization of one-dimensional nanoscale building blocks, such as metallic nanowires and carbon nanotubes, within a scanning electron microscope (SEM) or a transmission electron microscope (TEM) chamber equipped with a quantitative nanoindenter. The unique design of these devices makes it possible to convert compression from nanoindentation to uni-axial tension at the sample stages. Fabrication of the micro-devices was carried out on both standard p doped wafers and on silicon on insulator (SOI) wafers using established micro-fabrication processes. Finite element analysis was employed to model the device behavior under mechanical loading in order to ascertain loading parameters. Nanoscratch and in situ nanoindentation experiments were performed in order to obtain the applied force vs. top shuttle displacement curves for the devices. Finally, individual Ni nanowires were picked up, placed and clamped onto the sample stages to act as tensile specimens. © 2008 IEEE.