In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

Shudong Wang; Weilong Zhu; Yajing Shen; Juan Ren; Xueyong Wei

doi:10.1109/INERTIAL48129.2020.9090093

In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

Shudong Wang
, Weilong Zhu
, Yajing Shen
, Juan Ren
, Xueyong Wei^*

^*Corresponding author for this work

Department of Biomedical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.

Original language	English
Title of host publication	2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
Publisher	IEEE
ISBN (Electronic)	978-1-7281-2983-9
DOIs	https://doi.org/10.1109/INERTIAL48129.2020.9090093
Publication status	Published - Mar 2020
Event	7^th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020) - Grand Prince Hotel Hiroshima (Virtual), Hiroshima, Japan Duration: 23 Mar 2020 → 26 Mar 2020 https://2020.ieee-inertial.org/

Publication series

Name	INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings

Conference

Conference	7^th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020)
Abbreviated title	INERTIAL 2020
Place	Japan
City	Hiroshima
Period	23/03/20 → 26/03/20
Internet address	https://2020.ieee-inertial.org/

Funding

This work was financially supported by the National Key R&D Program of China (No. 2018YFB2002303), Natural Science Foundation of China (No. 51575439) and Key Research and Development Program of Shaanxi Province (2018ZDCXL-GY-02-03). We also appreciate the support from International Joint Laboratory for Micro/Nano Manufacturing and Measurement Technology.

Research Keywords

dual-axis
MEMS
resonant accelerometer

Access Output

10.1109/INERTIAL48129.2020.9090093

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

Wang, S., Zhu, W., Shen, Y., Ren, J., & Wei, X. (2020). In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity. In 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL) Article 9090093 (INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings). IEEE. https://doi.org/10.1109/INERTIAL48129.2020.9090093

@inproceedings{72402d068c494a81adc4a03dd40e1ccb,

title = "In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity",

abstract = "In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.",

keywords = "dual-axis, MEMS, resonant accelerometer",

author = "Shudong Wang and Weilong Zhu and Yajing Shen and Juan Ren and Xueyong Wei",

year = "2020",

month = mar,

doi = "10.1109/INERTIAL48129.2020.9090093",

language = "English",

series = "INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings",

publisher = "IEEE",

booktitle = "2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)",

address = "United States",

note = "7<sup>th</sup> IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020), INERTIAL 2020 ; Conference date: 23-03-2020 Through 26-03-2020",

url = "https://2020.ieee-inertial.org/",

}

Wang, S, Zhu, W, Shen, Y, Ren, J & Wei, X 2020, In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity. in 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)., 9090093, INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings, IEEE, 7^th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020), Hiroshima, Japan, 23/03/20. https://doi.org/10.1109/INERTIAL48129.2020.9090093

In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity. / Wang, Shudong; Zhu, Weilong; Shen, Yajing et al.
2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL). IEEE, 2020. 9090093 (INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

AU - Wang, Shudong

AU - Zhu, Weilong

AU - Shen, Yajing

AU - Ren, Juan

AU - Wei, Xueyong

PY - 2020/3

Y1 - 2020/3

N2 - In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.

AB - In this work, we present a high-performance MEMS resonant accelerometer. The finite element method (FEM) results showed that the sensor can measure the magnitude and direction of in-plane acceleration at the same time. Meanwhile, the novel structure can theoretically eliminate the influence of temperature drift. The practical testing results indicated the combined scale factor of the proposed sensor can reach more than 4026.5Hz/g. The Allan deviation results showed that the typical zero-bias stability of the self-excited oscillator was about 80ppb, and the resolution of the sensor was about 6.6μg.

KW - dual-axis

KW - MEMS

KW - resonant accelerometer

UR - https://www.scopus.com/pages/publications/85085530430

UR - https://www.scopus.com/pages/publications/85085530430#tab=impact

U2 - 10.1109/INERTIAL48129.2020.9090093

DO - 10.1109/INERTIAL48129.2020.9090093

M3 - RGC 32 - Refereed conference paper (with host publication)

AN - SCOPUS:85085530430

T3 - INERTIAL - IEEE International Symposium on Inertial Sensors and Systems, Proceedings

BT - 2020 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)

PB - IEEE

T2 - 7<sup>th</sup> IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020)

Y2 - 23 March 2020 through 26 March 2020

ER -

In-plane Dual-axis MEMS Resonant Accelerometer with A Uniform Sensitivity

Abstract

Publication series

Conference

Funding

Research Keywords

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this