Abstract
We propose a method to improve the impact energy of ions implanted into the interior sidewalls of cylindrical specimens during plasma immersion ion implantation. Our idea is based on a zero potential conductive auxiliary electrode positioned at the axis of the implanted cylindrical bore. We calculate the structure of the ion-matrix sheath in an infinitely long cylindrical bore with an auxiliary electrode and analyze the dependence of the radius of the auxiliary electrode on the electric field in the bore. Our results show that the auxiliary electrode improves significantly the distributions of the potential and the electric field inside the cylindrical bore. In addition, because the auxiliary electrode improves the potential drop from axis to sidewalls of the bore and introduces an electric field component which does not vary when the ions are implanted into the sidewalls, the impact energy can be improved in a cylindrical bore during plasma immersion ion implantation. © 1996 American Institute of Physics.
| Original language | English |
|---|---|
| Pages (from-to) | 3815-3817 |
| Journal | Applied Physics Letters |
| Volume | 69 |
| Issue number | 25 |
| DOIs | |
| Publication status | Published - 16 Dec 1996 |
Publisher's Copyright Statement
- COPYRIGHT TERMS OF DEPOSITED FINAL PUBLISHED VERSION FILE: This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in Xuchu Zeng, Baoyin Tang, Paul K. Chu; Improving the plasma immersion ion implantation impact energy inside a cylindrical bore by using an auxiliary electrode. Appl. Phys. Lett. 16 December 1996; 69 (25): 3815–3817 and may be found at https://doi.org/10.1063/1.117114.