Improving the impact energy by using auxiliary electrode in a cylindrical bore

Research output: Journal Publications and ReviewsRGC 22 - Publication in policy or professional journal

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Author(s)

  • X. C. Zeng
  • S. Y. Wang
  • D. Z. Xing
  • Y. Gao
  • A. G. Liu
  • B. Y. Tang

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Detail(s)

Original languageEnglish
Journal / PublicationIEEE International Conference on Plasma Science
Publication statusPublished - 1996

Conference

TitleProceedings of the 1996 IEEE International Conference on Plasma Science
CityBoston, MA, USA
Period3 - 5 June 1996

Abstract

Recent research results indicate that ion implantation in small bores is not very promising because the ion-matrix sheath overlap reduces the impact energy of the ions. The present authors are proposing to use an auxiliary electrode, a conductive cylindrical bar with potential which is always zero at the axis of the cylindrical bore, to improve the impact energy. They have calculated the structure of the ion-matrix sheath in an infinitely long cylindrical bore (R≤D) with the auxiliary electrode and analyzed the dependence of its radius on the electric field in the bore. The results show that the auxiliary electrode improves the distribution of the potential and electric field in the cylindrical bore. Because the presence of the auxiliary electrode generates an electric field which does not change when the ions are implanted into the sidewalls, it is hoped that this technique can improve the impact energy for plasma immersion ion implantation into the interior sidewalls of a cylindrical bore.

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