IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf02 THIN FILMS BY PLASMA IMMERSION ION NITRIDATION

IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf0₂ THIN FILMS BY PLASMA IMMERSION ION NITRIDATION

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	9th International Workshop on Plasma-Based Ion Implantation and Deposition - Programme & Abstract Booklet
Pages	104
Publication status	Published - Sept 2007
Event	9th International Workshop on Plasma-Based Ion Implantation and Deposition (PBII&D 07) - Leipzig, Germany Duration: 2 Sept 2007 → 6 Sept 2007

Conference	9th International Workshop on Plasma-Based Ion Implantation and Deposition (PBII&D 07)
Place	Germany
City	Leipzig
Period	2/09/07 → 6/09/07

@inproceedings{aae3bf1fc97c4435a53ceec93c300a68,

title = "IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf02 THIN FILMS BY PLASMA IMMERSION ION NITRIDATION",

author = "Huang, \{A. P.\} and Shao, \{Z. S.\} and Chu, \{Paul K.\}",

year = "2007",

month = sep,

language = "English",

pages = "104",

booktitle = "9th International Workshop on Plasma-Based Ion Implantation and Deposition - Programme \& Abstract Booklet",

note = "9th International Workshop on Plasma-Based Ion Implantation and Deposition (PBII\&D 07) ; Conference date: 02-09-2007 Through 06-09-2007",

}

Huang, AP, Shao, ZS & Chu, PK 2007, IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf0₂ THIN FILMS BY PLASMA IMMERSION ION NITRIDATION. in 9th International Workshop on Plasma-Based Ion Implantation and Deposition - Programme & Abstract Booklet. pp. 104, 9th International Workshop on Plasma-Based Ion Implantation and Deposition (PBII&D 07), Leipzig, Germany, 2/09/07.

IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf0₂ THIN FILMS BY PLASMA IMMERSION ION NITRIDATION. / Huang, A. P. ; Shao, Z. S.; Chu, Paul K.
9th International Workshop on Plasma-Based Ion Implantation and Deposition - Programme & Abstract Booklet. 2007. p. 104.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - IMPROVEMENT OF MICROSTRUCTURE AND DIELECTRIC PROPERTIES OF Hf02 THIN FILMS BY PLASMA IMMERSION ION NITRIDATION

AU - Huang, A. P.

AU - Shao, Z. S.

AU - Chu, Paul K.

PY - 2007/9

Y1 - 2007/9

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 104

BT - 9th International Workshop on Plasma-Based Ion Implantation and Deposition - Programme & Abstract Booklet

T2 - 9th International Workshop on Plasma-Based Ion Implantation and Deposition (PBII&D 07)

Y2 - 2 September 2007 through 6 September 2007

ER -