IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO2 THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION

A. P. Huang; Ricky K. Y. Fu; Paul K. Chu

IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO₂ THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION

A. P. Huang
, Ricky K. Y. Fu
, Paul K. Chu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	14^th INTERNATIONAL CONFERENCE ON SURFACE MODIFICATION OF MATERIALS BY ION BEAMS - FINAL PROGRAM and ABSTRACTS
Pages	197
Publication status	Published - Sept 2005
Event	14^th International Conference on Surface Modification of Materials by Ion Beams - Kusadasi, Türkiye Duration: 4 Sept 2005 → 9 Sept 2005

Conference

Conference	14^th International Conference on Surface Modification of Materials by Ion Beams
Abbreviated title	SMMIB'05
Place	Türkiye
City	Kusadasi
Period	4/09/05 → 9/09/05

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@inproceedings{856751fc1d7a42f98426d65b370ea12c,

title = "IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO2 THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION",

author = "Huang, \{A. P.\} and Fu, \{Ricky K. Y.\} and Chu, \{Paul K.\}",

year = "2005",

month = sep,

language = "English",

pages = "197",

booktitle = "14th INTERNATIONAL CONFERENCE ON SURFACE MODIFICATION OF MATERIALS BY ION BEAMS - FINAL PROGRAM and ABSTRACTS",

note = "14<sup>th</sup> International Conference on Surface Modification of Materials by Ion Beams, SMMIB'05 ; Conference date: 04-09-2005 Through 09-09-2005",

}

Huang, AP, Fu, RKY & Chu, PK 2005, IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO₂ THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION. in 14^th INTERNATIONAL CONFERENCE ON SURFACE MODIFICATION OF MATERIALS BY ION BEAMS - FINAL PROGRAM and ABSTRACTS. pp. 197, 14^th International Conference on Surface Modification of Materials by Ion Beams, Kusadasi, Türkiye, 4/09/05.

IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO₂ THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION. / Huang, A. P.; Fu, Ricky K. Y.; Chu, Paul K.
14^th INTERNATIONAL CONFERENCE ON SURFACE MODIFICATION OF MATERIALS BY ION BEAMS - FINAL PROGRAM and ABSTRACTS. 2005. p. 197.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - IMPROVEMENT OF INTERFACIAL AND MICROSTRUCTURE PROPERTIES OF HIGH-k ZrO2 THIN FILMS FABRICATED BY FILTERED CATHODIC ARC DEPOSITION USING NITROGEN INCORPORATION

AU - Huang, A. P.

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

PY - 2005/9

Y1 - 2005/9

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 197

BT - 14th INTERNATIONAL CONFERENCE ON SURFACE MODIFICATION OF MATERIALS BY ION BEAMS - FINAL PROGRAM and ABSTRACTS

T2 - 14<sup>th</sup> International Conference on Surface Modification of Materials by Ion Beams

Y2 - 4 September 2005 through 9 September 2005

ER -