Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon

J. Luo; L. H. Li; H. T. Liu; K. M. Yu; Y. Xu; X. J. Zuo; P. Z. Zhu; Y. F. Ma; Ricky K. Y. Fu; Paul K. Chu

doi:10.1063/1.4875982

Author(s)

J. Luo
L. H. Li
H. T. Liu
Y. Xu
X. J. Zuo
P. Z. Zhu
Y. F. Ma
Ricky K. Y. Fu

Detail(s)

Original language	English
Article number	63506
Journal / Publication	Review of Scientific Instruments
Volume	85
Issue number	6
Publication status	Published - Jun 2014

Link(s)

DOI	DOI https://doi.org/10.1063/1.4875982 Final Published version
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Attachment(s)	Documents 5853690.pdf Final Published version, 946 KB, PDF Publisher's Copyright Statement This article may be downloaded for personal use only. Any other use requires prior permission of the author and AIP Publishing. This article appeared in J. Luo, L. H. Li, H. T. Liu, K. M. Yu, Y. Xu, X. J. Zuo, P. Z. Zhu, Y. F. Ma, Ricky K. Y. Fu, and Paul K. Chu , "Improved ion implant fluence uniformity in hydrogen enhanced glow discharge plasma immersion ion implantation into silicon", Review of Scientific Instruments 85, 063506 (2014) and may be found at https://doi.org/10.1063/1.4875982.
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-84903153217&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(b855b23b-104d-46ec-bfa6-3a8fb58464d4).html

Abstract

Enhanced glow discharge plasma immersion ion implantation does not require an external plasma source but ion focusing affects the lateral ion fluence uniformity, thereby hampering its use in high-fluence hydrogen ion implantation for thin film transfer and fabrication of silicon-on-insulator. Insertion of a metal ring between the sample stage and glass chamber improves the ion uniformity and reduces the ion fluence non-uniformity as the cathode voltage is raised. Two-dimensional multiple-grid particle-in-cell simulation confirms that the variation of electric field inside the chamber leads to mitigation of the ion focusing phenomenon and the results are corroborated experimentally by hydrogen forward scattering. © 2014 AIP Publishing LLC.