Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation

X. B. Tian; S. Q. Yang; J. T. Cui; Ricky K. Y.  Fu; Paul K. Chu

Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation

X. B. Tian
, S. Q. Yang
, J. T. Cui
, Ricky K. Y. Fu
, Paul K. Chu

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Original language	English
Title of host publication	13th International Conference on Surface Modification of Materials by Ion Beams - Program & Abstracts
Pages	93
Publication status	Published - Sept 2003
Event	13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03) - San Antonio, United States Duration: 21 Sept 2003 → 26 Sept 2003

Conference

Conference	13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03)
Abbreviated title	SMMIB 2003
Place	United States
City	San Antonio
Period	21/09/03 → 26/09/03

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@inproceedings{d13ef902931e4640b749dc5711367fa8,

title = "Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation",

author = "Tian, \{X. B.\} and Yang, \{S. Q.\} and Cui, \{J. T.\} and Fu, \{Ricky K. Y.\} and Chu, \{Paul K.\}",

year = "2003",

month = sep,

language = "English",

pages = "93",

booktitle = "13th International Conference on Surface Modification of Materials by Ion Beams - Program \& Abstracts",

note = "13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03), SMMIB 2003 ; Conference date: 21-09-2003 Through 26-09-2003",

}

Tian, XB, Yang, SQ, Cui, JT, Fu, RKY & Chu, PK 2003, Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation. in 13th International Conference on Surface Modification of Materials by Ion Beams - Program & Abstracts. pp. 93, 13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03), San Antonio, Texas, United States, 21/09/03.

Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation. / Tian, X. B.; Yang, S. Q.; Cui, J. T. et al.
13th International Conference on Surface Modification of Materials by Ion Beams - Program & Abstracts. 2003. p. 93.

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Implantation Dynamics during Non-uniform Plasma Immersion Ion Implantation

AU - Tian, X. B.

AU - Yang, S. Q.

AU - Cui, J. T.

AU - Fu, Ricky K. Y.

AU - Chu, Paul K.

PY - 2003/9

Y1 - 2003/9

M3 - RGC 32 - Refereed conference paper (with host publication)

SP - 93

BT - 13th International Conference on Surface Modification of Materials by Ion Beams - Program & Abstracts

T2 - 13th International Conference on Surface Modification of Materials by Ion Beams (SMMIB-03)

Y2 - 21 September 2003 through 26 September 2003

ER -