IC compatible optical coupling techniques for integration of arrow with photodetector

K. Benaissa, A. Nathan, S. T. Chu, W. Huang

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

10 Citations (Scopus)

Abstract

New structures for efficient coupling of light from an antiresonant reflecting optical waveguide (ARROW) to integrated photodiode are proposed and analyzed. Both end-fire and leakywave types of coupling have been considered and it is found that high-coupling efficiencies can be achieved by exploiting the intrinsic properties of the ARROW structure without requiring additional non-IC compatible materials. The coupling structures were simulated using a simple ray optics model as well as the beam propagation method (BPM). Fabrication process conditions and measurement results for various coupling structures are presented.
Original languageEnglish
Pages (from-to)1423-1432
JournalJournal of Lightwave Technology
Volume16
Issue number8
DOIs
Publication statusPublished - Aug 1998
Externally publishedYes

Research Keywords

  • ARROW
  • Coupling to photodiode
  • Silicon integrated circuit compatibility

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