I-2 Shallow Silicide Contact for Shallow Junction Devices

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Journal / PublicationIEEE Transactions on Electron Devices
Volume28
Issue number10
Publication statusPublished - Oct 1981
Externally publishedYes

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