Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects

Dixon T. K. Kwok; Jianhui Li; Xiaobo Ma; Paul K. Chu

doi:10.1088/0022-3727/43/9/095203

Author(s)

Dixon T. K. Kwok
Jianhui Li
Xiaobo Ma
Paul K. Chu

Detail(s)

Original language	English
Pages (from-to)	095203 -
Journal / Publication	Journal Physics D: Applied Physics
Volume	43
Issue number	9
Publication status	Published - 10 Mar 2010

Link(s)

DOI	DOI https://doi.org/10.1088/0022-3727/43/9/095203 Final Published version
	Check@CityULib
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(5fde8998-a64a-41d6-84e7-b727fa3f1326).html

Abstract

A hybrid protocol including particle-in-cell (PIC) ions and Boltzmann electron distribution is developed to simulate plasma immersion ion implantation (PIII) into an S-shaped bar inside a grounded cylindrical cage consisting of a mesh. A multiple-grid system with three cell confinements is adopted to achieve sufficient accuracy and acceptable computational time. The simulation results reveal that the implantation fluence distribution along the major curvature is more uniform than that obtained by conventional PIII.

Citation Format(s)

[ RIS ] [ BibTeX ]

Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. / Kwok, Dixon T. K.; Li, Jianhui; Ma, Xiaobo et al.
In: Journal Physics D: Applied Physics, Vol. 43, No. 9, 10.03.2010, p. 095203 -.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62) › 21_Publication in refereed journal › peer-review

Kwok, DTK, Li, J, Ma, X & Chu, PK 2010, 'Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects', Journal Physics D: Applied Physics, vol. 43, no. 9, pp. 095203 -. https://doi.org/10.1088/0022-3727/43/9/095203

Kwok, D. T. K., Li, J., Ma, X., & Chu, P. K. (2010). Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. Journal Physics D: Applied Physics, 43(9), 095203 -. https://doi.org/10.1088/0022-3727/43/9/095203

Kwok DTK, Li J, Ma X, Chu PK. Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. Journal Physics D: Applied Physics. 2010 Mar 10;43(9):095203 -. doi: 10.1088/0022-3727/43/9/095203

Kwok, Dixon T. K. ; Li, Jianhui ; Ma, Xiaobo et al. / Hybrid particle-in-cell (PIC) ions and Boltzmann electron distribution simulation of direct-current plasma immersion ion implantation into three-dimensional objects. In: Journal Physics D: Applied Physics. 2010 ; Vol. 43, No. 9. pp. 095203 -.