Abstract
Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromcchanical system's (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from individual carbon nanotubes (CNTs) and SiGe/Si nanocoils is described. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.
| Original language | English |
|---|---|
| Pages (from-to) | 163-174 |
| Journal | Springer Tracts in Advanced Robotics |
| Volume | 28 |
| DOIs | |
| Publication status | Published - 2007 |
| Externally published | Yes |
| Event | 12th International Symposium on Robotics Research (ISRR) - San Francisco, United States Duration: 12 Oct 2005 → 15 Oct 2005 |
UN SDGs
This output contributes to the following UN Sustainable Development Goals (SDGs)
-
SDG 9 Industry, Innovation, and Infrastructure
Fingerprint
Dive into the research topics of 'Hybrid Nanorobotic Approaches to NEMS'. Together they form a unique fingerprint.Cite this
- APA
- Author
- BIBTEX
- Harvard
- Standard
- RIS
- Vancouver