Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

Lixin Dong; Li Zhang; Dominik J. Bell; Bradley J. Nelson; Detlev Grützmacher

doi:10.1109/ROBOT.2006.1641904

Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

Lixin Dong
, Li Zhang
, Dominik J. Bell
, Bradley J. Nelson
, Detlev Grützmacher

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

14 Citations (Scopus)

Abstract

Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

Original language	English
Title of host publication	Proceedings of the 2006 IEEE International Conference on Robotics and Automation
Publisher	IEEE
Pages	1396-1401
ISBN (Print)	0-7803-9505-0
DOIs	https://doi.org/10.1109/ROBOT.2006.1641904
Publication status	Published - May 2006
Externally published	Yes
Event	2006 IEEE International Conference on Robotics and Automation, ICRA 2006 - Orlando, FL, United States Duration: 15 May 2006 → 19 May 2006

Publication series

Name	IEEE International Conference on Robotics and Automation
Volume	2006
ISSN (Print)	1050-4729

Conference

Conference	2006 IEEE International Conference on Robotics and Automation, ICRA 2006
Place	United States
City	Orlando, FL
Period	15/05/06 → 19/05/06

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Research Keywords

3D helical nanostructures
Nanoassembly
Nanomanipulation
Nanorobotics
NEMS

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10.1109/ROBOT.2006.1641904

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Dong, L., Zhang, L., Bell, D. J., Nelson, B. J., & Grützmacher, D. (2006). Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures. In Proceedings of the 2006 IEEE International Conference on Robotics and Automation (pp. 1396-1401). Article 1641904 ( IEEE International Conference on Robotics and Automation; Vol. 2006). IEEE. https://doi.org/10.1109/ROBOT.2006.1641904

@inproceedings{358931ba43e1421fb9d176f80190142b,

title = "Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures",

abstract = "Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives. ",

keywords = "3D helical nanostructures, Nanoassembly, Nanomanipulation, Nanorobotics, NEMS",

author = "Lixin Dong and Li Zhang and Bell, \{Dominik J.\} and Nelson, \{Bradley J.\} and Detlev Gr{\"u}tzmacher",

year = "2006",

month = may,

doi = "10.1109/ROBOT.2006.1641904",

language = "English",

isbn = "0-7803-9505-0",

series = " IEEE International Conference on Robotics and Automation",

publisher = "IEEE",

pages = "1396--1401",

booktitle = "Proceedings of the 2006 IEEE International Conference on Robotics and Automation",

address = "United States",

note = "2006 IEEE International Conference on Robotics and Automation, ICRA 2006 ; Conference date: 15-05-2006 Through 19-05-2006",

}

Dong, L, Zhang, L, Bell, DJ, Nelson, BJ & Grützmacher, D 2006, Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures. in Proceedings of the 2006 IEEE International Conference on Robotics and Automation., 1641904, IEEE International Conference on Robotics and Automation, vol. 2006, IEEE, pp. 1396-1401, 2006 IEEE International Conference on Robotics and Automation, ICRA 2006, Orlando, FL, United States, 15/05/06. https://doi.org/10.1109/ROBOT.2006.1641904

Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures. / Dong, Lixin; Zhang, Li; Bell, Dominik J. et al.
Proceedings of the 2006 IEEE International Conference on Robotics and Automation. IEEE, 2006. p. 1396-1401 1641904 ( IEEE International Conference on Robotics and Automation; Vol. 2006).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

AU - Dong, Lixin

AU - Zhang, Li

AU - Bell, Dominik J.

AU - Nelson, Bradley J.

AU - Grützmacher, Detlev

PY - 2006/5

Y1 - 2006/5

N2 - Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

AB - Robotic manipulation at the nanometer scale is a promising technology for structuring, characterizing and assembling nano building blocks into nanoelectromechanical systems (NEMS). Combined with recently developed nanofabrication processes, a hybrid approach to building NEMS from SiGe/Si/Cr nanocoils and Si/Cr nanospirals is presented. Nanosensors and nanoactuators are investigated from experimental, theoretical, and design perspectives.

KW - 3D helical nanostructures

KW - Nanoassembly

KW - Nanomanipulation

KW - Nanorobotics

KW - NEMS

UR - https://www.scopus.com/pages/publications/33845622071

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-33845622071&origin=recordpage

U2 - 10.1109/ROBOT.2006.1641904

DO - 10.1109/ROBOT.2006.1641904

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-9505-0

T3 - IEEE International Conference on Robotics and Automation

SP - 1396

EP - 1401

BT - Proceedings of the 2006 IEEE International Conference on Robotics and Automation

PB - IEEE

T2 - 2006 IEEE International Conference on Robotics and Automation, ICRA 2006

Y2 - 15 May 2006 through 19 May 2006

ER -

Hybrid nanorobotic approaches for fabricating NEMS from 3D helical nanostructures

Abstract

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UN SDGs

Research Keywords

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