Hybrid mold reversal imprint for three-dimensional and selective patterning

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Lithography Material Science
33
Dry Etching Material Science
33
Temperature Material Science
33
Polymers Material Science
33
Actuator Material Science
33
Topography Material Science
33
Nanostructure Material Science

Keyphrases

100
Hybrid Mold Keyphrases
100
Selective Patternin... Keyphrases
100
Three-dimensional P... Keyphrases
50
Silica Keyphrases
50
3D Structure Keyphrases
25
Dry Etching Keyphrases
25
Fabrication Methods Keyphrases
25
Pressure Pattern Keyphrases
25
Microanalysis Keyphrases
25
UV Lithography Keyphrases
25
Sensor-actuators Keyphrases
25
SU-8 Keyphrases
25
Lithography Keyphrases
25
3D Nanostructure Keyphrases
25
Optical Lithography Keyphrases
25
SU-8 Polymer Keyphrases
25
Missing Residues Keyphrases
25
Building Complex Keyphrases

INIS

100
hybrids INIS
100
molds INIS
37
substrates INIS
25
layers INIS
25
quartz INIS
12
comparative evaluat... INIS
12
etching INIS
12
dimensions INIS
12
spin INIS
12
applications INIS
12
polymers INIS
12
nanostructures INIS
12
fabrication INIS
12
sensors INIS
12
flexibility INIS
12
pressure range mega... INIS
12
actuators INIS
12
microanalysis INIS
12
residues INIS
12
topography INIS

Engineering

100
Hybrid Engineering
75
Substrates Engineering
50
Dimensional Structu... Engineering
50
Optical Lithography Engineering
50
Surface Pressure Engineering
50
Silicon Dioxide Engineering
25
Simplifies Engineering
25
Application Engineering
25
Fabrication Engineering
25
Dry Etching Engineering
25
Sensor Engineering
25
Polymers Engineering
25
Nanomaterial Engineering
25
Lithography Engineering
25
Building Engineering
25
Temperature Engineering
Research OutputsResearch Output authored by Hybrid mold reversal imprint for three-dimensional and selective patterning is tagged with the concept