Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Yasufumi Enami; Alex K.-Y. Jen; Gerald Meredith; Nasser Peyghambarian

doi:10.1117/12.527613

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

Yasufumi Enami
, Alex K.-Y. Jen
, Gerald Meredith
, Nasser Peyghambarian

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

4 Citations (Scopus)

Abstract

We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (V_π) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the V_π by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the V_π of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the V_π further.

Original language	English
Title of host publication	Organic Photonic Materials and Devices VI
Editors	James G. Grote, Toshikuni Kaino
Publisher	SPIE
Pages	28-35
Volume	5351
ISBN (Print)	9780819452597
DOIs	https://doi.org/10.1117/12.527613
Publication status	Published - 18 Jun 2004
Externally published	Yes
Event	Integrated Optoelectronic Devices 2004 - San Jose, CA, United States Duration: 26 Jan 2004 → 29 Jan 2004 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5350.toc

Publication series

Name	Proceedings of SPIE
Publisher	SPIE
Volume	5351
ISSN (Print)	0277-786X

Conference

Conference	Integrated Optoelectronic Devices 2004
Place	United States
City	San Jose, CA
Period	26/01/04 → 29/01/04
Internet address	https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5350.toc

Research Keywords

Electro-optic polymer
Fiber-coupling loss
Hybrid modulators
Sol-gel waveguide
Wet etching

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10.1117/12.527613

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Enami, Y., Jen, A. K.-Y., Meredith, G., & Peyghambarian, N. (2004). Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. In J. G. Grote, & T. Kaino (Eds.), Organic Photonic Materials and Devices VI (Vol. 5351, pp. 28-35). (Proceedings of SPIE; Vol. 5351). SPIE. https://doi.org/10.1117/12.527613

@inproceedings{b8b09c7d0f994d7c93254d72cdf910b0,

title = "Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides",

abstract = "We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (Vπ) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the Vπ by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the Vπ of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the Vπ further.",

keywords = "Electro-optic polymer, Fiber-coupling loss, Hybrid modulators, Sol-gel waveguide, Wet etching",

author = "Yasufumi Enami and Jen, \{Alex K.-Y.\} and Gerald Meredith and Nasser Peyghambarian",

year = "2004",

month = jun,

day = "18",

doi = "10.1117/12.527613",

language = "English",

isbn = "9780819452597",

volume = "5351",

series = "Proceedings of SPIE",

publisher = "SPIE",

pages = "28--35",

editor = "Grote, \{James G.\} and Toshikuni Kaino",

booktitle = "Organic Photonic Materials and Devices VI",

address = "United States",

note = "Integrated Optoelectronic Devices 2004 ; Conference date: 26-01-2004 Through 29-01-2004",

url = "https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5350.toc",

}

Enami, Y, Jen, AK-Y, Meredith, G & Peyghambarian, N 2004, Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. in JG Grote & T Kaino (eds), Organic Photonic Materials and Devices VI. vol. 5351, Proceedings of SPIE, vol. 5351, SPIE, pp. 28-35, Integrated Optoelectronic Devices 2004, San Jose, CA, United States, 26/01/04. https://doi.org/10.1117/12.527613

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides. / Enami, Yasufumi; Jen, Alex K.-Y.; Meredith, Gerald et al.
Organic Photonic Materials and Devices VI. ed. / James G. Grote; Toshikuni Kaino. Vol. 5351 SPIE, 2004. p. 28-35 (Proceedings of SPIE; Vol. 5351).

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

TY - GEN

T1 - Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

AU - Enami, Yasufumi

AU - Jen, Alex K.-Y.

AU - Meredith, Gerald

AU - Peyghambarian, Nasser

PY - 2004/6/18

Y1 - 2004/6/18

N2 - We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (Vπ) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the Vπ by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the Vπ of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the Vπ further.

AB - We report hybrid electro-optic (EO) polymer/sol-gel waveguide modulators with a structure for an EO polymer confined laterally in a sol-gel over cladding, which is fabricated by all-wet etching process. The structure enables an adiabatic transition between the sol-gel waveguide and thick EO polymer overlayer. Intensity mode is confined well in 0.9-μm-thick EO polymer overlayer, which reduces a half wave voltage (Vπ) due to increased overlap integral in the hybrid EO modulator. Straight channel birefringence EO modulators with the structure reduce the Vπ by the factor of 4 after guided wave well confined in the EO polymer. The straight channel waveguide modulator with 2.4-cm-long electrode demonstrated the Vπ of 13 V. Preliminary testing results using a Mach-Zehnder waveguide modulator were investigated to reduce the Vπ further.

KW - Electro-optic polymer

KW - Fiber-coupling loss

KW - Hybrid modulators

KW - Sol-gel waveguide

KW - Wet etching

UR - https://www.scopus.com/pages/publications/3543106703

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-3543106703&origin=recordpage

U2 - 10.1117/12.527613

DO - 10.1117/12.527613

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 9780819452597

VL - 5351

T3 - Proceedings of SPIE

SP - 28

EP - 35

BT - Organic Photonic Materials and Devices VI

A2 - Grote, James G.

A2 - Kaino, Toshikuni

PB - SPIE

T2 - Integrated Optoelectronic Devices 2004

Y2 - 26 January 2004 through 29 January 2004

ER -

Hybrid electro-optic polymer/sol-gel waveguide modulators fabricated by all-wet etching process, using straight channel and Mach-Zehnder waveguides

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