High-Precise Metallic Helical Microstructure Fabrication by Rotational Nanorobotic Manipulation System With Tilted Mandrel Compensation

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Original languageEnglish
Number of pages10
Journal / PublicationIEEE/ASME Transactions on Mechatronics
Online published19 May 2023
Publication statusOnline published - 19 May 2023


Metallic helical microstructures are significant components applied in many fields, such as mechatronics, photonics, microelectromechanical systems, and biomedical engineering, but their fabrication with high precision remains a challenge. Herein, we report a general controllable approach for high-precise micro metallic helical structure fabrication by a self-developed rotational nanorobotic manipulation system. To reduce the fabrication error induced from the tilted mandrel, first, we propose an end-effector trajectory planning method to precompensate the tilted angle during rotation. Further, a hybrid vision and position feedback strategy is also developed to automate the fabrication process for obtaining a helical structure with uniform pitch distance consequently. The experimental results verify that our method is able to fabricate various micro helical structures with different dimensions with high precision up to 6 μm (less than two pixel equivalent). The potential application of the helical structure as high-precise force sensor is also demonstrated for soft biomaterial (hemostatic sponges) characterization. This research paves an effective solution for the high-precise 3-D helical structure fabrication, which would prompt their applications in engineering and inspire other microstructure manufacturing as well. © 2023 IEEE.

Research Area(s)

  • 3-D metallic helical microstructure, Fabrication, Manipulators, Microstructure, micro–nano manipulation, micro–nano manufacturing, micro–nano robot, Spirals, Trajectory, Wires, Wrapping

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Publisher Copyright: IEEE

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