High-ion-energy and low-temperature deposition of diamond-like carbon (DLC) coatings with pulsed kV bias

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review

3 Scopus Citations
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Author(s)

  • Xiaokai An
  • Zhongzhen Wu
  • Liangliang Liu
  • Tielei Shao
  • Shu Xiao
  • Suihan Cui
  • Hai Lin
  • Ricky KY Fu
  • Xiubo Tian
  • Feng Pan

Detail(s)

Original languageEnglish
Pages (from-to)152-157
Journal / PublicationSurface and Coatings Technology
Volume365
Early online date30 Sep 2018
Publication statusPublished - 15 May 2019

Abstract

The high ion energy produced by the substrate bias is essential to the enhancement of the sp3 content in diamond-like carbon (DLC) coatings and adhesion with the substrate. However, excessive ion energy can turn into heat conversely converting sp3 into sp2 undermining the mechanical properties. In this work, pulsed kV bias is applied to increase the carbonous ion energy to increase the sp3 content in DLC coatings and improve the adhesion with the substrate simultaneously while avoiding adverse temperature increase. The high ionized carbonous ions flux is formed by an anode-layer ion source with C2H2 gas and Cr/CrCx/CrC interlayers are introduced between the DLC coating and high-speed steel (HSS) substrate to release the internal stress by high-power impulse magnetron sputtering (HiPIMS). The DLC coatings not only have a large sp3 content, high hardness of 18.5 GPa, a low friction coefficient of 0.12, superior anti-corrosion behaviors,and wear rate of 0.87 × 10−15 m3/N m for 4 h, but also exhibits outstanding adhesion (Lc = 76 N) with the HSS substrate in spite of a DLC coating thickness of 13 μm.

Research Area(s)

  • Adhesion, DLC, Electrochemical corrosion properties, Mechanical properties, Substrate bias

Citation Format(s)

High-ion-energy and low-temperature deposition of diamond-like carbon (DLC) coatings with pulsed kV bias. / An, Xiaokai; Wu, Zhongzhen; Liu, Liangliang; Shao, Tielei; Xiao, Shu; Cui, Suihan; Lin, Hai; Fu, Ricky KY; Tian, Xiubo; Chu, Paul K; Pan, Feng.

In: Surface and Coatings Technology, Vol. 365, 15.05.2019, p. 152-157.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalNot applicablepeer-review