Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

1 Citation (Scopus)

Abstract

This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).
Original languageEnglish
Title of host publication2017 IEEE SENSORS Proceedings
PublisherIEEE
ISBN (Print)978-1-5090-1012-7
DOIs
Publication statusPublished - Oct 2017
Event16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom
Duration: 30 Oct 20171 Nov 2017

Conference

Conference16th IEEE SENSORS Conference, ICSENS 2017
Country/TerritoryUnited Kingdom
CityGlasgow
Period30/10/171/11/17

Research Keywords

  • higher-order mode in water
  • MEMS resonator
  • piezoelectric-on-silicon
  • resonance sensing

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