Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water

Abid Ali; Joshua E.-Y. Lee

doi:10.1109/ICSENS.2017.8233904

Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

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Abstract

This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).

Original language	English
Title of host publication	2017 IEEE SENSORS Proceedings
Publisher	IEEE
ISBN (Print)	978-1-5090-1012-7
DOIs	https://doi.org/10.1109/ICSENS.2017.8233904
Publication status	Published - Oct 2017
Event	16th IEEE SENSORS Conference, ICSENS 2017 - Glasgow, United Kingdom Duration: 30 Oct 2017 → 1 Nov 2017

Conference

Conference	16th IEEE SENSORS Conference, ICSENS 2017
Country/Territory	United Kingdom
City	Glasgow
Period	30/10/17 → 1/11/17

Research Keywords

higher-order mode in water
MEMS resonator
piezoelectric-on-silicon
resonance sensing

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10.1109/ICSENS.2017.8233904

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title = "Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water",

abstract = "This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).",

keywords = "higher-order mode in water, MEMS resonator, piezoelectric-on-silicon, resonance sensing",

author = "Abid Ali and Lee, {Joshua E.-Y.}",

year = "2017",

month = oct,

doi = "10.1109/ICSENS.2017.8233904",

language = "English",

isbn = "978-1-5090-1012-7",

booktitle = "2017 IEEE SENSORS Proceedings",

publisher = "IEEE",

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note = "16th IEEE SENSORS Conference, ICSENS 2017 ; Conference date: 30-10-2017 Through 01-11-2017",

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T1 - Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water

AU - Ali, Abid

AU - Lee, Joshua E.-Y.

PY - 2017/10

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N2 - This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).

AB - This paper reports on the design and experimental characterization of a higher-order wine glass (third order: WG3) mode MEMS square plate resonator to reduce the effect of fluidic damping and thereby enhancing the quality (Q) factor in water for biosensing applications. We show that the lateral strain profile of the WG3 mode is well suited for fully-differential piezoelectric transduction (which helps to reduce parasitic feedthrough) and offers reasonable electromechanical coupling. We experimentally demonstrate that exciting the WG3 mode in water results in a higher Q factor (Q of 410 at 36.36 MHz) compared to the fundamental wine glass (WG1) mode (Q of 340 at 10.53 MHz).

KW - higher-order mode in water

KW - MEMS resonator

KW - piezoelectric-on-silicon

KW - resonance sensing

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U2 - 10.1109/ICSENS.2017.8233904

DO - 10.1109/ICSENS.2017.8233904

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 978-1-5090-1012-7

BT - 2017 IEEE SENSORS Proceedings

PB - IEEE

T2 - 16th IEEE SENSORS Conference, ICSENS 2017

Y2 - 30 October 2017 through 1 November 2017

ER -

Higher-order wine glass mode piezoelectric square resonator with improved quality factor in water

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