High-Cycle Fatigue of Polycrystalline Silicon Thin Films in Laboratory Air

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageEnglish
Article numberEE5.8
Pages (from-to)EE5.8.1-EE5.8.6
Journal / PublicationMaterials Research Society Symposium - Proceedings
Volume657
Publication statusPublished - Nov 2001
Externally publishedYes

Meeting

Title2000 Materials Research Society Fall Meeting
PlaceUnited States
CityBoston
Period27 November - 1 December 2000

Abstract

When subjected to alternating stresses, most materials degrade, e.g., suffer premature failure, due to a phenomenon known as fatigue. It is generally accepted that in brittle materials, such as ceramics, cyclic fatigue can only take place where there is some degree of toughening, implying that premature fatigue failure would not be expected in polycrystalline silicon where such toughening is absent. However, the fatigue failure of polysilicon is reported in the present work, based on tests on thirteen thin-film (2 μm thick) specimens cycled to failure in laboratory air (∼25°C, 30-50% relative humidity), where damage accumulation and failure of the notched cantilever beams were monitored electrically during the test. Specimen lives ranged from about 10 seconds to 34 days (5 × 105 to 1 × 1011 cycles) with the stress amplitude at failure being reduced to ∼50% of the low-cycle strength for lives in excess of 109 cycles.

Citation Format(s)

High-Cycle Fatigue of Polycrystalline Silicon Thin Films in Laboratory Air. / Muhlstein, C. L.; Brown, S.B.; Ritchie, R.O.
In: Materials Research Society Symposium - Proceedings, Vol. 657, EE5.8, 11.2001, p. EE5.8.1-EE5.8.6.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review