High temperature oxidation of Cr-N coatings prepared by high power pulsed magnetron sputtering - Plasma immersion ion implantation & deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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  • Zhongzhen Wu
  • Xiubo Tian
  • Shu Xiao
  • Chunzhi Gong
  • Feng Pan


Original languageEnglish
Pages (from-to)66-70
Journal / PublicationVacuum
Publication statusPublished - Oct 2014


Good oxidation and corrosion resistance are required for cutting tools and other industrial components used in high temperature applications. The highest operational temperature of CrN is normally about 500 °C. A denser Cr-N coating prepared by high power pulsed magnetron sputtering - plasma immersion ion implantation & deposition shows oxidation resistance up to 800 °C compare with those prepared by conventional magnetron sputtering. The hardness and corrosion resistance are shown and discussed. The enhanced performance can be attributed to a phase transition from CrN to Cr2N during annealing and there is no obvious oxide formation on the coatings. © 2014 Elsevier Ltd. All rights reserved.

Research Area(s)

  • Corrosion resistance, Cr-N, High temperature oxidation, HPPMS-PIII&D

Citation Format(s)