High quality ZnO : Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal

47 Scopus Citations
View graph of relations

Author(s)

  • André Anders
  • Sunnie H.N. Lim
  • Joakim Andersson
  • Johanna Rosén
  • Mike McFarland
  • Jeff Brown

Detail(s)

Original languageEnglish
Pages (from-to)3313-3319
Journal / PublicationThin Solid Films
Volume518
Issue number12
Publication statusPublished - 2 Apr 2010
Externally publishedYes

Abstract

Aluminum-doped zinc oxide, ZnO:Al or AZO, is a well-known n-type transparent conducting oxide with great potential in a number of applications currently dominated by indium tin oxide. In this study, the optical and electrical properties of AZO thin films deposited on glass and silicon by pulsed filtered cathodic arc deposition are systematically studied. In contrast to magnetron sputtering, this technique does not produce energetic negative ions, and therefore ion damage can be minimized. The quality of the AZO films strongly depends on growth temperature while only marginal improvements are obtained with post-deposition annealing. The best films, grown at a temperature of about 200 °C, have resistivities in the low to mid 10- 4 Ω cm range with a transmittance better than 85% in the visible part of the spectrum. It is remarkable that relatively good films of small thickness (60 nm) can be fabricated using this method. © 2009 Elsevier B.V.

Research Area(s)

  • Aluminum-doped zinc oxide, Filtered cathodic arc, Transparent conducting oxide

Citation Format(s)

High quality ZnO : Al transparent conducting oxide films synthesized by pulsed filtered cathodic arc deposition. / Anders, André; Lim, Sunnie H.N.; Yu, Kin Man; Andersson, Joakim; Rosén, Johanna; McFarland, Mike; Brown, Jeff.

In: Thin Solid Films, Vol. 518, No. 12, 02.04.2010, p. 3313-3319.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journal