High Q silicon photonic crystal cavities for functional cladding materials

Stefan Prorok, Alexander Yu. Petrov, Manfred Eich, Jingdong Luo, Alex K. Jen

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer.
Original languageEnglish
Title of host publication2013 IEEE Photonics Conference, IPC 2013
PublisherIEEE
Pages450-451
ISBN (Electronic)978-1-4577-1507-5
DOIs
Publication statusPublished - Sept 2013
Externally publishedYes
Event2013 26th IEEE Photonics Conference, IPC 2013 - Bellevue, WA, United States
Duration: 8 Sept 201312 Sept 2013

Conference

Conference2013 26th IEEE Photonics Conference, IPC 2013
PlaceUnited States
CityBellevue, WA
Period8/09/1312/09/13

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