Abstract
We demonstrate a novel method to define high Q silicon photonic crystal cavities with functional polymer cladding with ultra precision using spatially resolved electron beam bleaching of a chromophore doped polymer.
| Original language | English |
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| Title of host publication | 2013 IEEE Photonics Conference, IPC 2013 |
| Publisher | IEEE |
| Pages | 450-451 |
| ISBN (Electronic) | 978-1-4577-1507-5 |
| DOIs | |
| Publication status | Published - Sept 2013 |
| Externally published | Yes |
| Event | 2013 26th IEEE Photonics Conference, IPC 2013 - Bellevue, WA, United States Duration: 8 Sept 2013 → 12 Sept 2013 |
Conference
| Conference | 2013 26th IEEE Photonics Conference, IPC 2013 |
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| Place | United States |
| City | Bellevue, WA |
| Period | 8/09/13 → 12/09/13 |