TY - GEN
T1 - HIGH-Q LOW IMPEDANCE UHF-BAND ALN-ON-SI MEMS RESONATORS USING QUASI-SYMMETRICAL LAMB WAVE MODES
AU - Zhu, Haoshen
AU - Tu, Cheng
AU - LEE, Joshua E.-Y.
PY - 2016/2
Y1 - 2016/2
N2 - This paper describes the phase velocity dispersion characteristics of Lamb waves propagating in A1N-on-Si plates, which achieves high quality factor (Q > 10000) and low motional resistance (R-m<50 Q) at 260 MHz in air by using the fundamental quasi -symmetrical (QS(0)) mode. We have found that the ratio of the Si layer thickness (h(si)) over the acoustic wavelength (lambda) sets a limit for the QS(0) mode resonance at higher frequencies as increasing the ratio of hsA reduces the electromechanical coupling for the QS(0) mode while enhancing the spurious quasi-antisymmetrical (QA(0)) mode. Lastly, we also experimentally demonstrate that using multiple tethers helps suppress spurious modes
AB - This paper describes the phase velocity dispersion characteristics of Lamb waves propagating in A1N-on-Si plates, which achieves high quality factor (Q > 10000) and low motional resistance (R-m<50 Q) at 260 MHz in air by using the fundamental quasi -symmetrical (QS(0)) mode. We have found that the ratio of the Si layer thickness (h(si)) over the acoustic wavelength (lambda) sets a limit for the QS(0) mode resonance at higher frequencies as increasing the ratio of hsA reduces the electromechanical coupling for the QS(0) mode while enhancing the spurious quasi-antisymmetrical (QA(0)) mode. Lastly, we also experimentally demonstrate that using multiple tethers helps suppress spurious modes
UR - http://www.scopus.com/inward/record.url?scp=84971010722&partnerID=8YFLogxK
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-84971010722&origin=recordpage
U2 - 10.1109/MEMSYS.2016.7421794
DO - 10.1109/MEMSYS.2016.7421794
M3 - RGC 32 - Refereed conference paper (with host publication)
T3 - Proceedings IEEE Micro Electro Mechanical Systems
SP - 970
EP - 973
BT - 2016 IEEE 29TH INTERNATIONAL CONFERENCE ON MICRO ELECTRO MECHANICAL SYSTEMS (MEMS)
PB - IEEE
T2 - 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems
Y2 - 24 January 2016 through 28 January 2016
ER -