High-Precise Metallic Helical Microstructure Fabrication by Rotational Nanorobotic Manipulation System With Tilted Mandrel Compensation

Tieshan Zhang, Hao Ren, Gen Li, Panbing Wang, Wanfeng Shang*, Yajing Shen*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

1 Citation (Scopus)

Abstract

Metallic helical microstructures are significant components applied in many fields, such as mechatronics, photonics, microelectromechanical systems, and biomedical engineering, but their fabrication with high precision remains a challenge. Herein, we report a general controllable approach for high-precise micro metallic helical structure fabrication by a self-developed rotational nanorobotic manipulation system. To reduce the fabrication error induced from the tilted mandrel, first, we propose an end-effector trajectory planning method to precompensate the tilted angle during rotation. Further, a hybrid vision and position feedback strategy is also developed to automate the fabrication process for obtaining a helical structure with uniform pitch distance consequently. The experimental results verify that our method is able to fabricate various micro helical structures with different dimensions with high precision up to 6 μm (less than two pixel equivalent). The potential application of the helical structure as high-precise force sensor is also demonstrated for soft biomaterial (hemostatic sponges) characterization. This research paves an effective solution for the high-precise 3-D helical structure fabrication, which would prompt their applications in engineering and inspire other microstructure manufacturing as well. © 2023 IEEE.

Original languageEnglish
Pages (from-to)214-223
Number of pages10
JournalIEEE/ASME Transactions on Mechatronics
Volume29
Issue number1
Online published19 May 2023
DOIs
Publication statusPublished - Feb 2024

Bibliographical note

Publisher Copyright:
IEEE

Research Keywords

  • 3-D metallic helical microstructure
  • Fabrication
  • Manipulators
  • Microstructure
  • micro–nano manipulation
  • micro–nano manufacturing
  • micro–nano robot
  • Spirals
  • Trajectory
  • Wires
  • Wrapping

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