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Abstract
Metallic helical microstructures are significant components applied in many fields, such as mechatronics, photonics, microelectromechanical systems, and biomedical engineering, but their fabrication with high precision remains a challenge. Herein, we report a general controllable approach for high-precise micro metallic helical structure fabrication by a self-developed rotational nanorobotic manipulation system. To reduce the fabrication error induced from the tilted mandrel, first, we propose an end-effector trajectory planning method to precompensate the tilted angle during rotation. Further, a hybrid vision and position feedback strategy is also developed to automate the fabrication process for obtaining a helical structure with uniform pitch distance consequently. The experimental results verify that our method is able to fabricate various micro helical structures with different dimensions with high precision up to 6 μm (less than two pixel equivalent). The potential application of the helical structure as high-precise force sensor is also demonstrated for soft biomaterial (hemostatic sponges) characterization. This research paves an effective solution for the high-precise 3-D helical structure fabrication, which would prompt their applications in engineering and inspire other microstructure manufacturing as well. © 2023 IEEE.
Original language | English |
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Pages (from-to) | 214-223 |
Number of pages | 10 |
Journal | IEEE/ASME Transactions on Mechatronics |
Volume | 29 |
Issue number | 1 |
Online published | 19 May 2023 |
DOIs | |
Publication status | Published - Feb 2024 |
Bibliographical note
Publisher Copyright:IEEE
Research Keywords
- 3-D metallic helical microstructure
- Fabrication
- Manipulators
- Microstructure
- micro–nano manipulation
- micro–nano manufacturing
- micro–nano robot
- Spirals
- Trajectory
- Wires
- Wrapping
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Dive into the research topics of 'High-Precise Metallic Helical Microstructure Fabrication by Rotational Nanorobotic Manipulation System With Tilted Mandrel Compensation'. Together they form a unique fingerprint.Projects
- 1 Finished
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GRF: Microrobotic System for High-Precise Micro Helical Structure Fabrication
SHEN, Y. (Principal Investigator / Project Coordinator)
1/01/21 → 1/09/22
Project: Research