不同靶材料的高功率脉冲磁控溅射放电行为

High power pulsed magnetron sputtering discharge behavior of various target materials

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

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Material Science

Magnetron Sputterin... Material Science

Thin Film Depositio... Material Science

Physics

Magnetron Sputterin... Physics

Gas Discharges Physics

Thin Films Physics

Engineering

Magnetron Engineering

Sputtering Yield Engineering

Target Material Engineering

Thin Films Engineering

Mean Value Engineering

Chemical Engineering

Magnetron Sputterin... Chemical Engineering

Film Chemical Engineering

Research OutputsResearch Output authored by 不同靶材料的高功率脉冲磁控溅射放电行为 is tagged with the concept

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