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High-Performance Ammonia Plasma-Processed CsPbBr3 Perovskite Photodetectors

Zewen Lin (Co-first Author), Zhenxu Lin (Co-first Author), Jie Song (Co-first Author), Rui Huang*, Haixia Wu, Kaitao Chen, Li Xia, Yi Zhang, Hongliang Li, Yanqing Guo, Huihong Lin, Paul K. Chu*

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

Abstract

The pursuit of defect-suppressed metal halide perovskite films with optimal optoelectronic properties remains a persistent challenge in semiconductor device engineering. In this study, the effects of NH3 plasma on the fabrication of high-quality CsPbBr3 perovskite films are evaluated systematically. NH3 plasma generates NH2 and NH species, which enhance grain growth and reduce defect states. As a result, the trap density decreases significantly from 7.9 × 1012 cm–3 to 6.8 × 1011 cm–3, improving CsPbBr3 film quality. The photodetector assembled with the NH3 plasma-processed CsPbBr3 film delivers outstanding performance, including a responsivity of 62.7 A/W, detectivity of 7.7 × 1012 Jones, ultrafast response time of 0.1/0.3 ms, and exceptional stability, all of which surpass the metrics of the non-plasma-treated device. These findings offer a promising solution for enhancing the quality of CsPbBr3 perovskite films, thereby improving the properties of optoelectronic devices. © 2025 American Chemical Society
Original languageEnglish
Pages (from-to)5404-5411
JournalACS Applied Electronic Materials
Volume7
Issue number12
Online published11 Jun 2025
DOIs
Publication statusPublished - 24 Jun 2025

Funding

The authors would like to acknowledge the support of the Guangdong Basic and Applied Basic Research Foundation, Research Projects of the Department of Education of Guangdong Province (2021ZDJS039, 2024ZDZX1026), Guangdong Basic and Applied Basic Research Foundation (2024A1515012339), City University of Hong Kong Donation Research Grants (9220061 and DON-RMG 9229021), Program of Hanshan Normal University (XTP202402), and College Students’ Innovation and Entrepreneurship Training Program (202110578008 and S202310578021).

Research Keywords

  • Chemical vapor deposition
  • CsPbBr3 films
  • Plasma
  • NH3
  • Photoconductors
  • Photodetectors.

RGC Funding Information

  • RGC-funded

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