High flux metal ion implantation

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Author(s)

  • T. Zhang
  • J. H. Song
  • H. X. Zhang
  • X. J. Zhang
  • B. Y. Tang
  • O. R. Monteiro
  • I. G. Brown

Related Research Unit(s)

Detail(s)

Original languageEnglish
Journal / PublicationWeixi Jiagong Jishu/Microfabrication Technology
Issue number1
Publication statusPublished - Mar 2001

Citation Format(s)

High flux metal ion implantation. / Zhang, T.; Song, J. H.; Zhang, H. X.; Zhang, X. J.; Tang, B. Y.; Zhu, J. H.; Monteiro, O. R.; Brown, I. G.

In: Weixi Jiagong Jishu/Microfabrication Technology, No. 1, 03.2001.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal