High Dose-Rate SIMOX Synthesis by Plasma Implantation

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review

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Author(s)

  • J. Liu
  • S. S. Iyer
  • C. Hu
  • Nathan W. Cheung
  • J. Min

Detail(s)

Original languageEnglish
Publication statusPublished - Feb 1995
Externally publishedYes

Workshop

Title2nd International Workshop on Plasma-Based Ion Implantation (PBII2)
PlaceAustralia
CitySydney
Period12 - 15 February 1995

Abstract

Using a Separation by Plasma IMplantation of OXygen (SPIMOX) technique, we have recently achieved a breakthrough in high-dose rate SIMOX synthesis using an oxygen plasma. We succeeded in maintaining high voltages (>50kV) across the plasma sheath by using extremely low gas pressure (<0.1mTorr) but efficient ionisation plasma sources (ECR). An oxygen dose of 3×1017 cm-2 is accomplished within 3 minutes as compared to hours when using conventional ion implantation. By implanting with a bias of 50kV to substrate, an oxygen plasma excited by ECR source in the low sub-mTorr pressure range, and post-implantation annealing at 1300oC for 2 hours, a continuous buried SiO2 layer is formed underneath a single-crystalline silicon overlayer of about 30nm. By tuning the ration O2+:O+ ion concentrations in the plasma to approximately 1:2., we also obtain a double SIMOX structure with one implantation step. These results suggest plasma implantation can synthesise SIMOX with very high throughput and with the implantation time independent of wafer size.

Bibliographic Note

Publication information for this record has been verified with the author(s) concerned.

Citation Format(s)

High Dose-Rate SIMOX Synthesis by Plasma Implantation. / Liu, J. ; Iyer, S. S. ; Hu, C.; Cheung, Nathan W. ; Min, J.; Chu, P.K.

1995. Paper presented at 2nd International Workshop on Plasma-Based Ion Implantation (PBII2), Sydney, New South Wales, Australia.

Research output: Conference Papers (RGC: 31A, 31B, 32, 33)32_Refereed conference paper (no ISBN/ISSN)peer-review