@article{a840ef8766b948c6bc77aaab6b9e631d,
title = "High Aspect Ratio Structures for Microelectromechanical Systems",
author = "Pang, \{Stella W.\}",
note = "The Research Unit(s) information and publication title for this publication is provided by the author(s) concerned. The title on the full text of this publication is “High-aspect-ratio structures for MEMS”",
year = "2001",
month = apr,
doi = "10.1557/mrs2001.67",
language = "English",
volume = "26",
pages = "307--308",
journal = "MRS Bulletin",
issn = "0883-7694",
publisher = "Springer International Publishing ",
number = "4",
}