High Aspect Ratio Structures for Microelectromechanical Systems

Stella W. Pang

doi:10.1557/mrs2001.67

High Aspect Ratio Structures for Microelectromechanical Systems

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Original language	English
Pages (from-to)	307-308
Journal	MRS Bulletin
Volume	26
Issue number	4
DOIs	https://doi.org/10.1557/mrs2001.67
Publication status	Published - Apr 2001
Externally published	Yes

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The Research Unit(s) information and publication title for this publication is provided by the author(s) concerned. The title on the full text of this publication is “High-aspect-ratio structures for MEMS”

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title = "High Aspect Ratio Structures for Microelectromechanical Systems",

author = "Pang, {Stella W.}",

note = "The Research Unit(s) information and publication title for this publication is provided by the author(s) concerned. The title on the full text of this publication is “High-aspect-ratio structures for MEMS”",

year = "2001",

month = apr,

doi = "10.1557/mrs2001.67",

language = "English",

volume = "26",

pages = "307--308",

journal = "MRS Bulletin",

issn = "0883-7694",

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U2 - 10.1557/mrs2001.67

DO - 10.1557/mrs2001.67

M3 - RGC 21 - Publication in refereed journal

SN - 0883-7694

VL - 26

SP - 307

EP - 308

JO - MRS Bulletin

JF - MRS Bulletin

IS - 4

ER -

High Aspect Ratio Structures for Microelectromechanical Systems

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