H 原子吸附对 Si(113) 表面的影响

Influence of hydrogen adsorption on Si(113) surface

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

Detail(s)

Original languageChinese (Simplified)
Pages (from-to)815-819
Journal / Publication半导体学报
Volume16
Issue number11
Publication statusPublished - Nov 1995
Externally publishedYes

Abstract

本文采用半经验分子轨道理论方法 AM1 研究用 Si16H21 模拟的 Si(113) 高指数表面及其吸附 H 原子的体系,得到生成热和表面原子上受力随吸附的变化.从生成热分析得知,Si(113) 表面上形成 Si-H2 吸附比 Si-H 容易,且为放热吸附;受力分析指出了表面原子再构发生的趋向,而吸附则引起趋向改变.
A semiempirical molecular orbital method of AM1 was employed to study the clean and hydrogen adsorbed Si(113) surfaces using atomic cluster models of Si16H21 and HSi16H21, or H2Si16H21 respectively. The calculations of formation heats suggest that a Si-H2 adsorption is easier to be formed than a Si-H adsorption. The forces on surface atoms show the tendencies of the surface atomic reconstructions. With these results, discussions on some recent experimental results and suggestion to the Si(113) surface atomic reconstruction model are also presented.

Bibliographic Note

Publication information for this record has been verified with the author(s) concerned.

Citation Format(s)

H 原子吸附对 Si(113) 表面的影响. / 张瑞勤; 吴汲安; 邢益荣.

In: 半导体学报, Vol. 16, No. 11, 11.1995, p. 815-819.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review