Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics

H. Wong; C. K. Wong

doi:10.1109/MIEL.2010.5490537

Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics

H. Wong^*, C. K. Wong

^*Corresponding author for this work

Department of Electrical Engineering

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

Abstract

Silicon integrated photonics has attracted much attentions recently because of the available of silicon-based quantum devices and optical components. Dielectric films with embedded silicon nanocrystallites (Si-NCs) have been recognized as one of the promising light-emitting materials for this purpose. This work reviews some attempts reported recently for preparing dielectric-embedded Si-NCs based on the conventional CMOS processes. The mechanism for the Si-NCs formation is discussed. The material and light emitting properties of the as-prepared Si-NC embedded in dielectric films are studied in detail. © 2010 IEEE.

Original language	English
Title of host publication	2010 27th International Conference on Microelectronics, MIEL 2010 - Proceedings
Pages	15-19
DOIs	https://doi.org/10.1109/MIEL.2010.5490537
Publication status	Published - 2010
Event	2010 27th International Conference on Microelectronics, MIEL 2010 - Nis, Serbia Duration: 16 May 2010 → 19 May 2010

Conference

Conference	2010 27th International Conference on Microelectronics, MIEL 2010
Place	Serbia
City	Nis
Period	16/05/10 → 19/05/10

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10.1109/MIEL.2010.5490537

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title = "Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics",

abstract = "Silicon integrated photonics has attracted much attentions recently because of the available of silicon-based quantum devices and optical components. Dielectric films with embedded silicon nanocrystallites (Si-NCs) have been recognized as one of the promising light-emitting materials for this purpose. This work reviews some attempts reported recently for preparing dielectric-embedded Si-NCs based on the conventional CMOS processes. The mechanism for the Si-NCs formation is discussed. The material and light emitting properties of the as-prepared Si-NC embedded in dielectric films are studied in detail. {\textcopyright} 2010 IEEE.",

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year = "2010",

doi = "10.1109/MIEL.2010.5490537",

language = "English",

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AU - Wong, C. K.

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N2 - Silicon integrated photonics has attracted much attentions recently because of the available of silicon-based quantum devices and optical components. Dielectric films with embedded silicon nanocrystallites (Si-NCs) have been recognized as one of the promising light-emitting materials for this purpose. This work reviews some attempts reported recently for preparing dielectric-embedded Si-NCs based on the conventional CMOS processes. The mechanism for the Si-NCs formation is discussed. The material and light emitting properties of the as-prepared Si-NC embedded in dielectric films are studied in detail. © 2010 IEEE.

AB - Silicon integrated photonics has attracted much attentions recently because of the available of silicon-based quantum devices and optical components. Dielectric films with embedded silicon nanocrystallites (Si-NCs) have been recognized as one of the promising light-emitting materials for this purpose. This work reviews some attempts reported recently for preparing dielectric-embedded Si-NCs based on the conventional CMOS processes. The mechanism for the Si-NCs formation is discussed. The material and light emitting properties of the as-prepared Si-NC embedded in dielectric films are studied in detail. © 2010 IEEE.

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DO - 10.1109/MIEL.2010.5490537

M3 - RGC 32 - Refereed conference paper (with host publication)

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EP - 19

BT - 2010 27th International Conference on Microelectronics, MIEL 2010 - Proceedings

T2 - 2010 27th International Conference on Microelectronics, MIEL 2010

Y2 - 16 May 2010 through 19 May 2010

ER -

Growth of dielectric-embedded silicon nanocrystallites for silicon integrated photonics

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