Growth control and characterization of vertically aligned IrO2 nanorods

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review

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Author(s)

  • Reui-San Chen
  • Ying-Sheng Huang
  • Ya-Min Liang
  • Dah-Shyang Tsai
  • Yun Chi

Detail(s)

Original languageEnglish
Pages (from-to)2525-2529
Journal / PublicationJournal of Materials Chemistry
Volume13
Issue number10
Publication statusPublished - Oct 2003
Externally publishedYes

Abstract

Iridium dioxide (IrO2) nanorods with pointed tips have been grown on Si(100) and transition-metal-coated-Si(100) substrates, via metal-organic chemical vapor deposition (MOCVD), using (MeCp)Ir(COD) as the source reagent. The as-deposited nanorods were characterized using field-emission scanning electron microscopy (FESEM), transmission electron microscopy (TEM), X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS). FESEM micrographs revealed that the majority of the nanorods are a wedge shape in cross section and converge at top; occasionally several of them pack into a column of a spiral tip. The vertical alignment and packing density are significantly improved by prior deposition of a thin layer of Ti on Si. TEM and XRD results indicate that the sputtered Ti thin layer erects the nanorods in the c-axis direction. XPS spectra show that iridium in IrO2 nanorods also exist in a higher oxidation state.

Citation Format(s)

Growth control and characterization of vertically aligned IrO2 nanorods. / Chen, Reui-San; Huang, Ying-Sheng; Liang, Ya-Min; Tsai, Dah-Shyang; Chi, Yun; Kai, Ji-Jung.

In: Journal of Materials Chemistry, Vol. 13, No. 10, 10.2003, p. 2525-2529.

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)21_Publication in refereed journalpeer-review