Growth and photoluminescence studies of AlN thin films with different orientation degrees

Z. Q. Yao; Y. Q. Li; J. X. Tang; W. J. Zhang; S. T. Lee

doi:10.1016/j.diamond.2008.02.009

Author(s)

Z. Q. Yao
Y. Q. Li
J. X. Tang
W. J. Zhang
S. T. Lee

Related Research Unit(s)

Centre of Super-Diamond and Advanced Films

Detail(s)

Original language	English
Pages (from-to)	1785-1790
Journal / Publication	Diamond and Related Materials
Volume	17
Issue number	7-10
Publication status	Published - Jul 2008

Link(s)

DOI	DOI https://doi.org/10.1016/j.diamond.2008.02.009 Final Published version
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Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-48849103164&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(8d08f26e-48be-4b5b-8ee6-e8414a5556ce).html

Abstract

AlN thin films with different orientation degrees, i.e., (0002) textured, (0002) textured with traces of non-(0002) components, and randomly oriented, were deposited by radio frequency magnetron sputtering. The films were comprehensively characterized using scanning electron microscopy, X-ray diffraction, and X-ray photoelectron spectroscopy. The dependence of orientation degree on the nitrogen partial pressure during the deposition processes was revealed. Based on microstructural analysis with high-resolution transmission electron microscopy and photoluminescence measurements, the correlation between the orientation degree and photoluminescence was investigated. It was suggested that the defects induced in large-angle grain boundaries were possibly responsible for the enhanced non-band-edge emission. © 2008 Elsevier B.V. All rights reserved.

Research Area(s)

AlN thin films, Microstructure, Orientation degree, Photoluminescence

Citation Format(s)

[ RIS ] [ BibTeX ]

Growth and photoluminescence studies of AlN thin films with different orientation degrees. / Yao, Z. Q.; Li, Y. Q.; Tang, J. X. et al.
In: Diamond and Related Materials, Vol. 17, No. 7-10, 07.2008, p. 1785-1790.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Yao, ZQ, Li, YQ, Tang, JX, Zhang, WJ & Lee, ST 2008, 'Growth and photoluminescence studies of AlN thin films with different orientation degrees', Diamond and Related Materials, vol. 17, no. 7-10, pp. 1785-1790. https://doi.org/10.1016/j.diamond.2008.02.009

Yao, Z. Q., Li, Y. Q., Tang, J. X., Zhang, W. J., & Lee, S. T. (2008). Growth and photoluminescence studies of AlN thin films with different orientation degrees. Diamond and Related Materials, 17(7-10), 1785-1790. https://doi.org/10.1016/j.diamond.2008.02.009

Yao ZQ, Li YQ, Tang JX, Zhang WJ, Lee ST. Growth and photoluminescence studies of AlN thin films with different orientation degrees. Diamond and Related Materials. 2008 Jul;17(7-10):1785-1790. doi: 10.1016/j.diamond.2008.02.009

Yao, Z. Q. ; Li, Y. Q. ; Tang, J. X. et al. / Growth and photoluminescence studies of AlN thin films with different orientation degrees. In: Diamond and Related Materials. 2008 ; Vol. 17, No. 7-10. pp. 1785-1790.