Geometrical correlations of quantum dots in InAs/GaAs superlattice structure from electron tomography

Y. H. Wu*, L. Chang, L. C. Chen, H. S. Chen, F. R. Chen

*Corresponding author for this work

Research output: Journal Publications and ReviewsRGC 21 - Publication in refereed journalpeer-review

5 Citations (Scopus)

Abstract

In this study, the three-dimensional (3D) information about the structural properties of quantum dots (QDs) in InAs/GaAs superlattice structure has been illustrated using electron tomography in the mode of high-angle angular dark-field scanning transmission electron microscopy. Comparison of this 3D reconstruction with the two-dimensional projection at the same positions is made. The structural properties of embedded quantum dots have been evaluated from electron tomography. The correlation relationship of QDs in superlattice structure has been understood by accurate measurements of 3D geometric positions, which can be free of the overlapping effect from 2D cross section along different crystallographic orientations.
Original languageEnglish
Article number153108
JournalApplied Physics Letters
Volume93
Issue number15
DOIs
Publication statusPublished - 13 Oct 2008
Externally publishedYes

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