Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon

D.H. Alsem; C.L. Muhlstein; E.A. Stach; R.O. Ritchie

doi:10.1016/j.scriptamat.2008.03.043

Author(s)

D.H. Alsem
C.L. Muhlstein
E.A. Stach
R.O. Ritchie

Detail(s)

Original language	English
Pages (from-to)	931-935
Journal / Publication	Scripta Materialia
Volume	59
Issue number	9
Online published	16 Apr 2008
Publication status	Published - Nov 2008
Externally published	Yes

Link(s)

DOI	DOI https://doi.org/10.1016/j.scriptamat.2008.03.043 Final Published version
	Check@CityULib
Link to Scopus	https://www.scopus.com/record/display.uri?eid=2-s2.0-49649114864&origin=recordpage
Permanent Link	https://scholars.cityu.edu.hk/en/publications/publication(dbf0e991-896c-4540-b6fb-d18dfb761519).html

Abstract

Bulk silicon is not susceptible to high-cycle fatigue but micron-scale silicon films are. Using polysilicon resonators to determine stress-lifetime fatigue behavior in several environments, oxide layers are found to show up to four-fold thickening after cycling, which is not seen after monotonic loading or after cycling in vacuo. We believe that the mechanism of thin-film silicon fatigue is "reaction-layer fatigue", involving cyclic stress-induced thickening of the oxide and moisture-assisted cracking within this layer.

Research Area(s)

Fatigue, MEMS, Reaction-layer fatigue, Silicon

Citation Format(s)

[ RIS ] [ BibTeX ]

Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon. / Alsem, D.H.; Muhlstein, C.L.; Stach, E.A. et al.
In: Scripta Materialia, Vol. 59, No. 9, 11.2008, p. 931-935.

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Alsem, DH, Muhlstein, CL, Stach, EA & Ritchie, RO 2008, 'Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon', Scripta Materialia, vol. 59, no. 9, pp. 931-935. https://doi.org/10.1016/j.scriptamat.2008.03.043

Alsem, D. H., Muhlstein, C. L., Stach, E. A., & Ritchie, R. O. (2008). Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon. Scripta Materialia, 59(9), 931-935. https://doi.org/10.1016/j.scriptamat.2008.03.043

Alsem DH, Muhlstein CL, Stach EA, Ritchie RO. Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon. Scripta Materialia. 2008 Nov;59(9):931-935. Epub 2008 Apr 16. doi: 10.1016/j.scriptamat.2008.03.043

Alsem, D.H. ; Muhlstein, C.L. ; Stach, E.A. et al. / Further considerations on the high-cycle fatigue of micron-scale polycrystalline silicon. In: Scripta Materialia. 2008 ; Vol. 59, No. 9. pp. 931-935.