Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

Abid Ali; Joshua E.-Y Lee

doi:10.1109/TUFFC.2018.2872923

Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

Abid Ali^*, Joshua E.-Y Lee

^*Corresponding author for this work

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

19 Citations (Scopus)

Abstract

We present a unique lateral shear resonance mode excited in a micro-electro-mechanical (MEM) disk resonator. We refer to this proposed mode as the Button-like (BL) mode. The BL mode has a characteristic lateral strain profile (based on the sum of orthogonal strain components in the plane of fabrication) resembles a shirt button. Hence our choice of name for this mode. The strain profile of the BL mode is highly suited for piezoelectric transduction. Like the more widely reported Wine Glass (WG) or elliptical mode, the BL mode offers feedthrough cancellation through fully-differential transduction. But compared to the WG mode, the BL mode possesses higher coupling coefficient (k²_eff) and higher quality (Q) factor for the same disk radius. These advantages make the BL mode highly-attractive for realizing electrically-addressed MEM resonators for liquid phase sensing. This paper examines various design aspects pertaining to the BL mode: tether geometry, characterization setup, size of disk, and even the effect of the gap around the disk on Q factor. The highest Q factor measured in water is 410 based on a disk with a radius of 150 μm. The lowest motional resistance in water is 1.36 kΩ based on a disk with a radius of 400 μm.

Original language	English
Pages (from-to)	600-608
Journal	IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control
Volume	66
Issue number	3
Online published	5 Oct 2018
DOIs	https://doi.org/10.1109/TUFFC.2018.2872923
Publication status	Published - Mar 2019

Research Keywords

Aluminum nitride
Electrodes
Geometry
Liquids
MEMS resonators
Micromechanical devices
piezoelectric devices
Q-factor
resonant sensors
Strain

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title = "Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing",

abstract = "We present a unique lateral shear resonance mode excited in a micro-electro-mechanical (MEM) disk resonator. We refer to this proposed mode as the Button-like (BL) mode. The BL mode has a characteristic lateral strain profile (based on the sum of orthogonal strain components in the plane of fabrication) resembles a shirt button. Hence our choice of name for this mode. The strain profile of the BL mode is highly suited for piezoelectric transduction. Like the more widely reported Wine Glass (WG) or elliptical mode, the BL mode offers feedthrough cancellation through fully-differential transduction. But compared to the WG mode, the BL mode possesses higher coupling coefficient (k2eff) and higher quality (Q) factor for the same disk radius. These advantages make the BL mode highly-attractive for realizing electrically-addressed MEM resonators for liquid phase sensing. This paper examines various design aspects pertaining to the BL mode: tether geometry, characterization setup, size of disk, and even the effect of the gap around the disk on Q factor. The highest Q factor measured in water is 410 based on a disk with a radius of 150 μm. The lowest motional resistance in water is 1.36 kΩ based on a disk with a radius of 400 μm.",

keywords = "Aluminum nitride, Electrodes, Geometry, Liquids, MEMS resonators, Micromechanical devices, piezoelectric devices, Q-factor, resonant sensors, Strain",

author = "Abid Ali and Lee, {Joshua E.-Y}",

year = "2019",

month = mar,

doi = "10.1109/TUFFC.2018.2872923",

language = "English",

volume = "66",

pages = "600--608",

journal = "IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control",

issn = "0885-3010",

publisher = "IEEE",

number = "3",

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TY - JOUR

T1 - Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

AU - Ali, Abid

AU - Lee, Joshua E.-Y

PY - 2019/3

Y1 - 2019/3

N2 - We present a unique lateral shear resonance mode excited in a micro-electro-mechanical (MEM) disk resonator. We refer to this proposed mode as the Button-like (BL) mode. The BL mode has a characteristic lateral strain profile (based on the sum of orthogonal strain components in the plane of fabrication) resembles a shirt button. Hence our choice of name for this mode. The strain profile of the BL mode is highly suited for piezoelectric transduction. Like the more widely reported Wine Glass (WG) or elliptical mode, the BL mode offers feedthrough cancellation through fully-differential transduction. But compared to the WG mode, the BL mode possesses higher coupling coefficient (k2eff) and higher quality (Q) factor for the same disk radius. These advantages make the BL mode highly-attractive for realizing electrically-addressed MEM resonators for liquid phase sensing. This paper examines various design aspects pertaining to the BL mode: tether geometry, characterization setup, size of disk, and even the effect of the gap around the disk on Q factor. The highest Q factor measured in water is 410 based on a disk with a radius of 150 μm. The lowest motional resistance in water is 1.36 kΩ based on a disk with a radius of 400 μm.

AB - We present a unique lateral shear resonance mode excited in a micro-electro-mechanical (MEM) disk resonator. We refer to this proposed mode as the Button-like (BL) mode. The BL mode has a characteristic lateral strain profile (based on the sum of orthogonal strain components in the plane of fabrication) resembles a shirt button. Hence our choice of name for this mode. The strain profile of the BL mode is highly suited for piezoelectric transduction. Like the more widely reported Wine Glass (WG) or elliptical mode, the BL mode offers feedthrough cancellation through fully-differential transduction. But compared to the WG mode, the BL mode possesses higher coupling coefficient (k2eff) and higher quality (Q) factor for the same disk radius. These advantages make the BL mode highly-attractive for realizing electrically-addressed MEM resonators for liquid phase sensing. This paper examines various design aspects pertaining to the BL mode: tether geometry, characterization setup, size of disk, and even the effect of the gap around the disk on Q factor. The highest Q factor measured in water is 410 based on a disk with a radius of 150 μm. The lowest motional resistance in water is 1.36 kΩ based on a disk with a radius of 400 μm.

KW - Aluminum nitride

KW - Electrodes

KW - Geometry

KW - Liquids

KW - MEMS resonators

KW - Micromechanical devices

KW - piezoelectric devices

KW - Q-factor

KW - resonant sensors

KW - Strain

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DO - 10.1109/TUFFC.2018.2872923

M3 - RGC 21 - Publication in refereed journal

SN - 0885-3010

VL - 66

SP - 600

EP - 608

JO - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

JF - IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

IS - 3

ER -

Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

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GRF: Exploiting Thickness Shear Mode Acoustic Resonance in Piezoelectric-on-Si Unreleased Micromechanical Resonators for Gravimetric Biosensing in Fluid-Damped Media

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Fully Differential Piezoelectric Button-Like Mode Disk Resonator for Liquid Phase Sensing

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GRF: Exploiting Thickness Shear Mode Acoustic Resonance in Piezoelectric-on-Si Unreleased Micromechanical Resonators for Gravimetric Biosensing in Fluid-Damped Media

Cite this