Fully Differential Higher Order Transverse Mode Piezoelectric Membrane Resonators for Enhanced Liquid-Phase Quality Factors

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3 Scopus Citations
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Original languageEnglish
Article number104004
Number of pages10
Journal / PublicationJournal of Micromechanics and Microengineering
Issue number10
Online published3 Sept 2021
Publication statusPublished - Oct 2021


This paper investigates the characteristics of higher-order transverse mode fully clamped membrane resonators that are piezoelectrically transduced as a class of resonators that completely seal the domain above the resonator from the domain below. Such isolation between the top and bottom of a resonator is preferable when encasing the device in a microfluidic cell for liquid-phase sensing measurements, a setup that can be beneficial for sensing applications. Most fully clamped membrane resonators are hampered by low liquid-phase quality factor (Q) and large motional resistance (Rm). This paper describes the design of higher-order transverse (2, 2) mode square membrane and (2, 0) mode circular membrane resonators, and the effect of device scaling on liquid-phase Q and Rm. We show a best-case liquid-phase Rm of 54 kΩ and Q of 270 among the various membrane sizes tested. This level of liquid-phase Q is higher than some contour mode resonators. Compared to other fully clamped membrane resonators in the literature, the results here represent a significant improvement in both Rm and Q, highlighting the potential of these membrane resonators for liquid-phase mass sensing applications.

Research Area(s)

  • MEMS resonators, membrane resonators, piezoelectric devices, liquid-phase sensing

Citation Format(s)