Frequency tunable micromachined RF oscillators

Research output: Journal Publications and Reviews (RGC: 21, 22, 62)22_Publication in policy or professional journal

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Author(s)

Detail(s)

Original languageEnglish
Pages (from-to)18-25
Journal / PublicationProceedings of SPIE - The International Society for Optical Engineering
Volume4230
Publication statusPublished - 2000
Externally publishedYes

Conference

TitleMicromachining and Microfabrication
PlaceSingapore
CitySingapure
Period28 - 30 November 2000

Abstract

High frequency, micromechanical bandpass filter, with tunable frequency and bandwidth are demonstrated in a polysilicon surface micromachining technology. These filter utilized a parallel-resonator architecture, in which properly phased outputs from two or more micromechanical resonators are combined to yield a desired filter spectrum. Damping effect was shown to have a significance factor in affecting the flat passband of the filter and will be further analyse in this paper.

Research Area(s)

  • Bandpass filter, RF MEMS, Superheterodyne receiver, Tunable oscillators