Formation of iridium silicide layer by high dose iridium ion implantation into silicon

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

Overview

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Material Science

Silicon Material Science

Ion Implantation Material Science

Silicide Material Science

Iridium Ion Material Science

Iridium Material Science

Annealing Material Science

Radiation Damage Material Science

Surface (Surface Sc... Material Science

Engineering

Ion Implantation Engineering

Room Temperature Engineering

Implanted Sample Engineering

Radiation Effect Engineering

Ion Source Engineering

Phase Formation Engineering

Beam Energy Engineering

Physics

Room Temperature Physics

Ion Implantation Physics

Regrowth Physics

Metal Ion Physics

Radiation Effect Physics

Ion Source Physics

Metal Vapor Physics

Research OutputsResearch Output authored by Formation of iridium silicide layer by high dose iridium ion implantation into silicon is tagged with the concept

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