Abstract
This paper presents an analytical study on the forced vibration of micro-switches under combined electrostatic, intermolecular forces and axial residual stress. The micro-switch considered in this study is made of non-homogeneous functionally graded material with two material phases. The nonlinear partial differential equation which describes the forced vibration of the micro-beam is derived based on the framework of von Karman-type geometric nonlinearity and Euler-Bernoulli beam theory, and are solved using the method of averaging. The modulations of the amplitude of clamped-clamped micro-switch are obtained. The present results are validated through direct comparisons with published experimental results. Excellent agreement has been achieved. A parametric study is conducted to show the effects of material composition and AC harmonic force on the frequency response characteristics of the micro-switch.
| Original language | English |
|---|---|
| Pages (from-to) | 280-287 |
| Journal | Procedia Engineering |
| Volume | 14 |
| DOIs | |
| Publication status | Published - 2011 |
| Event | 12th East Asia-Pacific Conference on Structural Engineering and Construction (EASEC-12) - Hong Kong Convention & Exhibition Centre, Hong Kong, China Duration: 26 Jan 2011 → 28 Jan 2011 http://bccw.cityu.edu.hk/easec12/wp_home.asp |
Research Keywords
- Forced vibration
- Frequency response
- Functionally graded material
- Micro-beam
Publisher's Copyright Statement
- This full text is made available under CC-BY-NC-ND 3.0. https://creativecommons.org/licenses/by-nc-nd/3.0/
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