TY - GEN
T1 - Force measurement with pico-Newton order resolution using a carbon nanotube probe
AU - Arai, Fumihito
AU - Nakajima, Masahiro
AU - Dong, Lixin
AU - Fukuda, Toshio
PY - 2002/10
Y1 - 2002/10
N2 - Force measurement with pico-Newton (pN) order resolution is presented by using a carbon nanotube (CNT) probe. Based on the theoretical analysis, a CNT is suitable for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of an atomic force microscope (AFM) cantilever, by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.
AB - Force measurement with pico-Newton (pN) order resolution is presented by using a carbon nanotube (CNT) probe. Based on the theoretical analysis, a CNT is suitable for the sensitive force measurement. A CNT probe is constructed by attaching a CNT to the tip of an atomic force microscope (AFM) cantilever, by the electron-beam-induced deposition (EBID) though the nanorobotic manipulators inside a field-emission scanning electron microscope (FE-SEM). In order to attach a CNT quickly and correctly, CNTs are dispersed in ethanol by ultrasonic waves for several hours and oriented by electrophoresis. We measured pico-Newton order contact forces with a CNT probe, which is constructed with nanorobotic manipulators, by measuring deformation of a CNT probe from FE-SEM images.
KW - Atomic force microscopy
KW - Atomic layer deposition
KW - Atomic measurements
KW - Carbon nanotubes
KW - Ethanol
KW - Force measurement
KW - Joining processes
KW - Probes
KW - Scanning electron microscopy
KW - Ultrasonic variables measurement
UR - https://www.scopus.com/pages/publications/0344752618
UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0344752618&origin=recordpage
U2 - 10.1109/MHS.2002.1058019
DO - 10.1109/MHS.2002.1058019
M3 - RGC 32 - Refereed conference paper (with host publication)
SN - 0-7803-7611-0
T3 - MHS 2002 - Proceedings of 2002 International Symposium on Micromechatronics and Human Science
SP - 105
EP - 110
BT - MHS 2002 - Proceedings of 2002 International Symposium on Micromechatronics and Human Science
PB - IEEE
T2 - 13th Annual International Symposium on Micromechatronics and Human Science, MHS 2002
Y2 - 20 October 2002 through 23 October 2002
ER -