Force-Guided Assembly of Micro Mirrors

Yantao Shen; Ning Xi; Wen Jung Li

doi:10.1109/IROS.2003.1249189

Force-Guided Assembly of Micro Mirrors

Yantao Shen
, Ning Xi
, Wen Jung Li

Research output: Chapters, Conference Papers, Creative and Literary Works › RGC 32 - Refereed conference paper (with host publication) › peer-review

33 Citations (Scopus)

Abstract

This paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices. © 2003 IEEE

Original language	English
Title of host publication	Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003)
Publisher	IEEE
Pages	2149-2154
Volume	3
ISBN (Print)	0-7803-7860-1
DOIs	https://doi.org/10.1109/IROS.2003.1249189
Publication status	Published - Oct 2003
Externally published	Yes
Event	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) - Las Vegas, United States Duration: 27 Oct 2003 → 31 Oct 2003 https://ieeexplore.ieee.org/xpl/conhome/8832/proceeding

Conference

Conference	2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003)
Place	United States
City	Las Vegas
Period	27/10/03 → 31/10/03
Internet address	https://ieeexplore.ieee.org/xpl/conhome/8832/proceeding

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Access Output

10.1109/IROS.2003.1249189

Other Access Options

Check CityUHK Library

Permanent Link

Right click to copy link

Cite this

@inproceedings{8ed3eec7f8bd40f5b0b97eb75711c220,

title = "Force-Guided Assembly of Micro Mirrors",

abstract = "This paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices. {\textcopyright} 2003 IEEE",

author = "Yantao Shen and Ning Xi and Li, \{Wen Jung\}",

year = "2003",

month = oct,

doi = "10.1109/IROS.2003.1249189",

language = "English",

isbn = "0-7803-7860-1",

volume = "3",

pages = "2149--2154",

booktitle = "Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003)",

publisher = "IEEE",

address = "United States",

note = "2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003) ; Conference date: 27-10-2003 Through 31-10-2003",

url = "https://ieeexplore.ieee.org/xpl/conhome/8832/proceeding",

}

TY - GEN

T1 - Force-Guided Assembly of Micro Mirrors

AU - Shen, Yantao

AU - Xi, Ning

AU - Li, Wen Jung

PY - 2003/10

Y1 - 2003/10

N2 - This paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices. © 2003 IEEE

AB - This paper aims at developing the force-guided microassembly technology with in-situ PVDF piezoelectric force sensing and control. By using the designed force sensors with the effective signal processing techniques, the micro contact force/impact signal and its derivative can be extracted and processed. Furthermore, based on a new sensor-referenced control scheme, micro mirrors can be reliably assembled by regulating the micro contact force. Experimental results verify the performance of the developed micro force sensing and control system. Ultimately the technology will provide a critical and major step towards the development of automated manufacturing processes for batch assembly of micro devices. © 2003 IEEE

UR - https://www.scopus.com/pages/publications/0347409421

UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-0347409421&origin=recordpage

U2 - 10.1109/IROS.2003.1249189

DO - 10.1109/IROS.2003.1249189

M3 - RGC 32 - Refereed conference paper (with host publication)

SN - 0-7803-7860-1

VL - 3

SP - 2149

EP - 2154

BT - Proceedings - 2003 IEEE International Conference on Intelligent Robots and Systems (IROS 2003)

PB - IEEE

T2 - 2003 IEEE/RSJ International Conference on Intelligent Robots and Systems (IROS 2003)

Y2 - 27 October 2003 through 31 October 2003

ER -

Force-Guided Assembly of Micro Mirrors

Abstract

Conference

UN SDGs

Access Output

Other Access Options

Permanent Link

Other Files and Links

Fingerprint

Cite this