TY - JOUR
T1 - Finger-inspired rigid-soft hybrid tactile sensor with superior sensitivity at high frequency
AU - Zhang, Jinhui
AU - Yao, Haimin
AU - Mo, Jiaying
AU - Chen, Songyue
AU - Xie, Yu
AU - Ma, Shenglin
AU - Chen, Rui
AU - Luo, Tao
AU - Ling, Weisong
AU - Qin, Lifeng
AU - Wang, Zuankai
AU - Zhou, Wei
PY - 2022
Y1 - 2022
N2 - Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.
AB - Among kinds of flexible tactile sensors, piezoelectric tactile sensor has the advantage of fast response for dynamic force detection. However, it suffers from low sensitivity at high-frequency dynamic stimuli. Here, inspired by finger structure—rigid skeleton embedded in muscle, we report a piezoelectric tactile sensor using a rigid-soft hybrid force-transmission-layer in combination with a soft bottom substrate, which not only greatly enhances the force transmission, but also triggers a significantly magnified effect in d31 working mode of the piezoelectric sensory layer, instead of conventional d33 mode. Experiments show that this sensor exhibits a super-high sensitivity of 346.5 pC N−1 (@ 30 Hz), wide bandwidth of 5–600 Hz and a linear force detection range of 0.009–4.3 N, which is ~17 times the theoretical sensitivity of d33 mode. Furthermore, the sensor is able to detect multiple force directions with high reliability, and shows great potential in robotic dynamic tactile sensing.
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UR - https://www.scopus.com/record/pubmetrics.uri?eid=2-s2.0-85136849247&origin=recordpage
U2 - 10.1038/s41467-022-32827-7
DO - 10.1038/s41467-022-32827-7
M3 - RGC 21 - Publication in refereed journal
C2 - 36038557
SN - 2041-1723
VL - 13
JO - Nature Communications
JF - Nature Communications
M1 - 5076
ER -