Field Emission Properties of Individual Carbon Nanotubes in Nanorobotic Manipulation and Electron-Beam-Induced Deposition

Fumihito Arai; Pou Liu; Lixin Dong; Toshio Fukuda

doi:10.20965/jrm.2004.p0597

Field Emission Properties of Individual Carbon Nanotubes in Nanorobotic Manipulation and Electron-Beam-Induced Deposition

Fumihito Arai
, Pou Liu
, Lixin Dong
, Toshio Fukuda

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

13 Citations (Scopus)

18 Downloads (CityUHK Scholars)

Abstract

Field emission properties of individual multiwalled carbon nanotubes (MWNTs) were studied in nanorobotic manipulation and electron-beam-induced deposition (EBID). Nanotube emitters are constructed by picking up and assembling individual nanotubes on a commercially available atomic force microscope (AFM) cantilever or a tungsten probe. The relationship between field emission current and interelectrode distance was obtained by changing the distance between the tip of the nanotube emitter and the counterpart anode, which can be potentially applied as the principle for an approaching sensor to detect nanometer scale distance by observing field emission current in real time. Field emission current on a microampere scale from a CNT emitter was shown to be strong enough for EBID without obviously degrading emitters. Deposit topology was related to current density or the emitter shape, suggesting that information on emitter geometry could be obtained from EBID deposits. Energy dispersive X-ray spectrometry (EDS) analysis of deposits from W(CO)6 showed that the tungsten mass exceeds 80% on the average among compositions. Much higher voltage may degrade the emitter, and saturated current may be used to adjust the emitter length in a controlled way. © 2004, Fuji Technology Press. All rights reserved.

Original language	English
Pages (from-to)	597-603
Journal	Journal of Robotics and Mechatronics
Volume	16
Issue number	6
DOIs	https://doi.org/10.20965/jrm.2004.p0597
Publication status	Published - 1 Dec 2004
Externally published	Yes

Bibliographical note

Publication details (e.g. title, author(s), publication statuses and dates) are captured on an “AS IS” and “AS AVAILABLE” basis at the time of record harvesting from the data source. Suggestions for further amendments or supplementary information can be sent to [email protected].

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 13 Climate Action

Research Keywords

carbon nanotubes
electron-beam-induced deposition
field emission
nanorobotic manipulation

Publisher's Copyright Statement

This full text is made available under CC-BY-ND 4.0. https://creativecommons.org/licenses/by-nd/4.0/

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abstract = "Field emission properties of individual multiwalled carbon nanotubes (MWNTs) were studied in nanorobotic manipulation and electron-beam-induced deposition (EBID). Nanotube emitters are constructed by picking up and assembling individual nanotubes on a commercially available atomic force microscope (AFM) cantilever or a tungsten probe. The relationship between field emission current and interelectrode distance was obtained by changing the distance between the tip of the nanotube emitter and the counterpart anode, which can be potentially applied as the principle for an approaching sensor to detect nanometer scale distance by observing field emission current in real time. Field emission current on a microampere scale from a CNT emitter was shown to be strong enough for EBID without obviously degrading emitters. Deposit topology was related to current density or the emitter shape, suggesting that information on emitter geometry could be obtained from EBID deposits. Energy dispersive X-ray spectrometry (EDS) analysis of deposits from W(CO)6 showed that the tungsten mass exceeds 80\% on the average among compositions. Much higher voltage may degrade the emitter, and saturated current may be used to adjust the emitter length in a controlled way. {\textcopyright} 2004, Fuji Technology Press. All rights reserved.",

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AB - Field emission properties of individual multiwalled carbon nanotubes (MWNTs) were studied in nanorobotic manipulation and electron-beam-induced deposition (EBID). Nanotube emitters are constructed by picking up and assembling individual nanotubes on a commercially available atomic force microscope (AFM) cantilever or a tungsten probe. The relationship between field emission current and interelectrode distance was obtained by changing the distance between the tip of the nanotube emitter and the counterpart anode, which can be potentially applied as the principle for an approaching sensor to detect nanometer scale distance by observing field emission current in real time. Field emission current on a microampere scale from a CNT emitter was shown to be strong enough for EBID without obviously degrading emitters. Deposit topology was related to current density or the emitter shape, suggesting that information on emitter geometry could be obtained from EBID deposits. Energy dispersive X-ray spectrometry (EDS) analysis of deposits from W(CO)6 showed that the tungsten mass exceeds 80% on the average among compositions. Much higher voltage may degrade the emitter, and saturated current may be used to adjust the emitter length in a controlled way. © 2004, Fuji Technology Press. All rights reserved.

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KW - field emission

KW - nanorobotic manipulation

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Field Emission Properties of Individual Carbon Nanotubes in Nanorobotic Manipulation and Electron-Beam-Induced Deposition

Abstract

Bibliographical note

UN SDGs

Research Keywords

Publisher's Copyright Statement

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