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Field emission characteristics of oriented AlN thin film on tungsten tip

  • Shuanglin Yue
  • , Changzhi Gu
  • , Chengying Shi
  • , Chunyi Zhi

Research output: Chapters, Conference Papers, Creative and Literary WorksRGC 32 - Refereed conference paper (with host publication)peer-review

Abstract

By using radio frequency magnetron reactive sputtering system, oriented AlN films with different thickness were deposited on tungsten tips. Compared studies of field emission characteristics were performed between the bare and A1N coated W tips. The results showed that enhanced electron emission can be obtained from oriented A1N film on W tip. The hysteresis behaviors shown in Current-Electric field (I-E) curves during downward electric field sweeps were observed and the extent of hysteresis in I-E curves strongly depended on the thickness of the A1N films. The stability measurement of field emission current presented that the hysteresis can be attributed to the charging in A1N film as an insulator.
Original languageEnglish
Title of host publicationIVESC2004 - The 5th International Vacuum Electron Sources Conference Proceedings
Pages81-83
DOIs
Publication statusPublished - Sept 2004
Externally publishedYes
Event5th International Vacuum Electron Sources Conference (IVESC2004) - The Media Center Hotel, Beijing, China
Duration: 6 Sept 200410 Sept 2004

Conference

Conference5th International Vacuum Electron Sources Conference (IVESC2004)
PlaceChina
CityBeijing
Period6/09/0410/09/04

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