Fault Detection of Plasma Etchers Using Optical Emission Spectra

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Emission Spectrosco... Material Science
25
Oxide Compound Material Science
25
Devices Material Science
25
Materials Material Science
25
Polymers Material Science
25
Detection System Material Science

Mathematics

100
Fault detection Mathematics
83
Wavelength Mathematics
33
Selection Mathematics
16
Number Mathematics
16
Calculate Mathematics
16
Sensor Mathematics
16
Sphere Mathematics
16
Multiway Principal ... Mathematics
16
Principal Component... Mathematics

Earth and Planetary Sciences

100
Emission Spectra Earth and Planetary Scien...
100
Light Emission Earth and Planetary Scien...
100
Fault detection Earth and Planetary Scien...
66
Spectroscopy Earth and Planetary Scien...
66
Spectrometer Earth and Planetary Scien...
50
Spectra Earth and Planetary Scien...
33
Rate Earth and Planetary Scien...
33
Fault Earth and Planetary Scien...
33
Selection Earth and Planetary Scien...
33
Principal Component... Earth and Planetary Scien...
16
Investigation Earth and Planetary Scien...
16
Model Earth and Planetary Scien...
16
Oxide Earth and Planetary Scien...
16
Amount Earth and Planetary Scien...
16
Experiment Earth and Planetary Scien...
16
Literature Earth and Planetary Scien...
16
Information Earth and Planetary Scien...
16
Suitability Earth and Planetary Scien...
16
Analytical Method Earth and Planetary Scien...
16
Spheres Earth and Planetary Scien...

Keyphrases

100
Optical Emission Sp... Keyphrases
100
Fault Detection Keyphrases
100
Optical Emission Sp... Keyphrases
100
Plasma Etcher Keyphrases
75
Wafer Keyphrases
50
Wavelength Selectio... Keyphrases
50
Fault Classificatio... Keyphrases
50
Multiple Scans Keyphrases
25
Oxides Keyphrases
25
Etching Rate Keyphrases
25
Deposition Rate Keyphrases
25
Principal Coordinat... Keyphrases
25
Number of Wavelengt... Keyphrases
25
Microdevice Keyphrases
25
Cost Reduction Keyphrases
25
Sensor Systems Keyphrases
25
Fault Detection Sys... Keyphrases
25
Austin Keyphrases
25
Monitoring Model Keyphrases
25
Etcher Keyphrases
25
Spectra Data Keyphrases
25
Etch-stop Keyphrases
25
Applied Materials Keyphrases
25
Fault Detection Ind... Keyphrases
25
Multiscale Principa... Keyphrases
25
Polymer Deposition Keyphrases
25
Typical Faults Keyphrases

INIS

100
detection INIS
100
plasma INIS
100
emission spectra INIS
83
wavelengths INIS
66
emission spectrosco... INIS
50
spectra INIS
50
data INIS
33
classification INIS
33
principal component... INIS
16
information INIS
16
spheres INIS
16
monitoring INIS
16
reduction INIS
16
comparative evaluat... INIS
16
oxides INIS
16
cost INIS
16
deposition INIS
16
polymers INIS
16
devices INIS
16
sensitivity INIS
16
sensors INIS

Physics

100
Emission Spectra Physics
100
Detection Physics
100
Light Emission Physics
100
Blood Plasma Physics
80
Optical Emission Sp... Physics
60
Spectra Physics
60
Wafer Physics
20
Model Physics
20
Information Physics
20
Spheres Physics
20
Oxide Physics
20
Detection System Physics

Engineering

100
Emission Spectra Engineering
100
Detection Engineering
100
Light Emission Engineering
80
Wavelength Engineering
40
Principal Component... Engineering
40
Component Analysis Engineering
20
Etch Rate Engineering
20
Sphere Engineering
20
Polymers Engineering
20
Deposition Rate Engineering
20
Sensor System Engineering
20
System Fault Detect... Engineering
20
Selected Wavelength Engineering
20
Experiment Engineering
20
Model Engineering
Research OutputsResearch Output authored by Fault Detection of Plasma Etchers Using Optical Emission Spectra is tagged with the concept