Fatigue Degradation of Nanometer-Scale Silicon Dioxide Reaction Layers on Silicon Structural Films

Research output: Journal Publications and Reviews › RGC 21 - Publication in refereed journal › peer-review

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Material Science

100
Silicon Material Science
100
Silicon Dioxide Material Science
83
Thin Films Material Science
50
Cracks Material Science
33
Oxidation Reaction Material Science
33
Fatigue of Material... Material Science
33
Surface (Surface Sc... Material Science
16
Characterization Material Science
16
Oxide Compound Material Science
16
Temperature Material Science
16
Fracture Toughness Material Science
16
Metal Material Science
16
Microscopy Material Science
16
Transmission Electr... Material Science
16
Materials Material Science
16
Monolayers Material Science
16
Coating Material Science
16
Crack Growth Material Science
16
Oxide Surface Material Science
16
Fracture Mechanics Material Science
16
Fatigue Behavior Material Science
16
Bulk Silicon Material Science
16
Microelectromechani... Material Science
16
Air Material Science

Keyphrases

100
Silicon Dioxide Keyphrases
100
Fatigue Degradation Keyphrases
100
Nanometer Scale Keyphrases
100
Reaction Layer Keyphrases
100
Structural Film Keyphrases
66
Fatigue Failure Keyphrases
66
Thin-film Silicon Keyphrases
33
Transmission Electr... Keyphrases
33
Numerical Model Keyphrases
33
Room Temperature Keyphrases
33
Loading Conditions Keyphrases
33
Structural Applicat... Keyphrases
33
Crack Growth Keyphrases
33
Oxidation Mechanism Keyphrases
33
Surface Oxide Layer Keyphrases
33
Oxide Layer Keyphrases
33
Cyclic Loading Keyphrases
33
Fatigue Behavior Keyphrases
33
Failure Mechanism Keyphrases
33
Crack Initiation Keyphrases
33
Fatigue Life Keyphrases
33
Synergism Keyphrases
33
Stressful Life Even... Keyphrases
33
Catastrophic Failur... Keyphrases
33
Surface Micromachin... Keyphrases
33
Bulk Silicon Keyphrases
33
Silica Layer Keyphrases
33
Micro-electro-mecha... Keyphrases
33
Cyclic Fatigue Keyphrases
33
Film-forming Keyphrases
33
Fracture Strength Keyphrases
33
Air Environment Keyphrases
33
Stress Amplitude Keyphrases
33
Silicon Thin Film Keyphrases
33
Interfacial Fractur... Keyphrases
33
Monolayer Coating Keyphrases
33
Fatigue Characteriz... Keyphrases
33
Infrared Microscopy Keyphrases
33
Critical Crack Size Keyphrases
33
Silicon Structure Keyphrases
33
Stress Fatigue Keyphrases
33
S-N Fatigue Keyphrases
33
Sequential Oxidatio... Keyphrases
33
Silicon via Keyphrases
33
Cracking Process Keyphrases
33
Environmentally Ass... Keyphrases

INIS

100
films INIS
100
silicon oxides INIS
100
silicon INIS
100
layers INIS
100
fatigue INIS
50
thin films INIS
40
failures INIS
30
surfaces INIS
30
cracks INIS
20
oxidation INIS
20
oxides INIS
20
cracking INIS
10
metals INIS
10
environment INIS
10
size INIS
10
transmission electr... INIS
10
growth INIS
10
coatings INIS
10
applications INIS
10
solutions INIS
10
loading INIS
10
crack growth INIS
10
temperature range 0... INIS
10
air INIS
10
amplitudes INIS
10
origin INIS
10
khz range INIS
10
fracture mechanics INIS
10
microscopy INIS
10
silica INIS
10
mitigation INIS
10
synergism INIS
10
fracture strength INIS
10
microelectromechani... INIS

Engineering

100
Thin Films Engineering
100
Nanometre Engineering
100
Silicon Dioxide Engineering
40
Surface Engineering
40
Oxide Layer Engineering
40
Fatigue Life Engineering
40
Fatigue Failure Engineering
40
Film Silicon Engineering
20
Mechanisms Engineering
20
Numerical Model Engineering
20
High Frequency Engineering
20
Structural Applicat... Engineering
20
Crack Growth Engineering
20
Critical Crack Engineering
20
Surface Oxide Engineering
20
Fatigue Behavior Engineering
20
Failure Mechanism Engineering
20
Small Scale Engineering
20
Crack Size Engineering
20
Catastrophic Failur... Engineering
20
Bulk Silicon Engineering
20
Microelectromechani... Engineering
20
Cyclic Fatigue Engineering
20
Stress Amplitude Engineering
20
Cyclic Loading Cond... Engineering
20
Room Air Temperatur... Engineering
20
Initiation of Crack Engineering
20
Monolayer Coating Engineering
20
Experiment Engineering
20
Environment Engineering
20
Cycle Engineering
20
Cracks Engineering
20
Fracture Mechanics Engineering
20
Fracture Strength Engineering
Research OutputsResearch Output authored by Fatigue Degradation of Nanometer-Scale Silicon Dioxide Reaction Layers on Silicon Structural Films is tagged with the concept